Growth Mechanism and Film Properties in Pulsed Laser-Plasma Deposition

1991 ◽  
Vol 236 ◽  
Author(s):  
S. Metev ◽  
K. Meteva
Keyword(s):  
Laser Plasma ◽  
Growth Process ◽  
Plasma Deposition ◽  
Pulsed Laser ◽  
Deposition Process ◽  
Experimental Investigations ◽  
Direct Relation ◽  
Film Properties ◽  
Experimental Conditions ◽  
Laser Flux

AbstractIn the paper the results of a theoretical investigation of the growth process of laser-plasma deposited thin films are discussed. A kinetic approach has been used to establish direct relation between experimental conditions (laser flux density, substrate temperature) and film properties (thickness, structure). The results of some experimental investigations of the deposition process are presented confirming the general conclusions of the developed theoretical model.

Growth Mechanism and Film Properties in Pulsed Laser-Plasma Deposition

1991 ◽  
Vol 235 ◽  
Author(s):  
S. Metev ◽  
K. Meteva
Keyword(s):  
Laser Plasma ◽  
Growth Process ◽  
Plasma Deposition ◽  
Pulsed Laser ◽  
Deposition Process ◽  
Experimental Investigations ◽  
Direct Relation ◽  
Film Properties ◽  
Experimental Conditions ◽  
Laser Flux

ABSTRACTIn the paper the results of a theoretical investigation of the growth process of laser-plasma deposited thin films are discussed. A kinetic approach has been used to establish direct relation between experimental conditions (laser flux density, substrate temperature) and film properties (thickness, structure). The results of some experimental investigations of the deposition process are presented confirming the general conclusions of the developed theoretical model.

Design and installation of a CO2-pulsed laser plasma deposition system for the growth of mass product nanostructures

2013 ◽  
Vol 28 (13) ◽  
pp. 1747-1752 ◽  
Author(s):  
Muhammad Sajjad ◽  
Xiaoyan Peng ◽  
Jin Chu ◽  
Hongxin Zhang ◽  
Peter Feng
Keyword(s):  
Laser Plasma ◽  
Plasma Deposition ◽  
Pulsed Laser ◽  
Image Position

Abstract

Plasma parameters in pulsed laser-plasma deposition of thin films

1996 ◽  
pp. 122-125
Author(s):  
S. Metev ◽  
M. Ozegowski ◽  
G. Sepold ◽  
S. Burmester
Keyword(s):  
Thin Films ◽  
Laser Plasma ◽  
Plasma Deposition ◽  
Pulsed Laser ◽  
Plasma Parameters

A-Site Ordered, Perovskite-Like Manganites Grown by PLD or Laser-MBE: Their Growth, Structural and Physical Characterization

1999 ◽  
Vol 602 ◽  
Author(s):  
B. Mercey ◽  
A.M. Haghiri-Gosnet ◽  
Ph. Lecoeur ◽  
D. Chippaux ◽  
B. Raveau ◽  
...  
Keyword(s):  
Magnetic Properties ◽  
Pulsed Laser Deposition ◽  
Growth Process ◽  
Pulsed Laser ◽  
Deposition Process ◽  
Laser Deposition ◽  
Physical Characterization ◽  
Laser Mbe ◽  
Deposition Processes ◽  
A Site

AbstractUsing both a “classical” pulsed laser deposition process and a laser-MBE process, superlattices in the Pr0.5Sr0.5MnO3 system were grown from PrMnO3 and SrMnO3 targets. A-site ordering of perovskite-like manganite was achieved using both deposition processes. However the electric and magnetic properties of the superlattices are shown to be strongly dependent on the growth process.

scholarly journals Calcium Phosphate Layers Deposited on Thermal Sensitive Polymer Substrates in Radio Frequency Magnetron Plasma Discharge

Coatings ◽  
2019 ◽  
Vol 9 (11) ◽  
pp. 709 ◽  
Author(s):  
Andreea Groza ◽  
Dragana B. Dreghici ◽  
Mihai Ganciu
Keyword(s):  
Calcium Phosphate ◽  
Radio Frequency ◽  
Plasma Deposition ◽  
Rf Magnetron Sputtering ◽  
Deposition Process ◽  
Experimental Conditions ◽  
Substrate Heating ◽  
Before And After ◽  
The Fourier Transform ◽  
Calcium Phosphate Coatings

Calcium phosphate coatings were deposited on thermally sensitive polyprophylene substrates in radio frequency (rf) magnetron sputtering discharge. The steady state of the deposition plasma and its components were identified by deposition rate measurements and mass spectrometry. Low rf powers and deposition rates, with a 10 min plasma on/off temporal deposition scheme, were established as suitable experimental conditions for the deposition of calcium phosphate layers on the thermoplastic polymers. By scanning electron microscopy and atomic force microscopy, the influence of the polymer substrate heating to the surface coating topography was studied. The results showed that the thermal patterning of the polymers during the plasma deposition process favors the embedding of the calcium phosphate into the substrate, the increase of the coating surface roughness, and a good adherence of the layers. The layers generated in the 10 min plasma on/10 min plasma off deposition conditions were not cracked or exfoliated. The Fourier Transform Infrared spectra of the polyprophylene substrates presented similar molecular bands before and after the depositions of calcium phosphate layers.

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