Tribological Propertees of Carbon thin Films Prepared by Plasma-Free Sputtering Method

1991 ◽  
Vol 239 ◽  
Author(s):  
T. Hirata ◽  
M. Naoe
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Magnetron Sputtering ◽  
Amorphous Carbon ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Amorphous Carbon Films ◽  
Magnetic Disk ◽  
Protective Layers ◽  
Better Than

ABSTRACTAmorphous “Diamond-like” carbon films were deposited on plasma-free substrates at low temperature by the Facing Targets Sputtering (FTS) method. Tribological characteristics determined by tap, scratch and slide tests were much better than those for amorphous carbon films deposited by the conventional Magnetron Sputtering (MS) method. Consequently, these films deposited by the FTS method were surely useful for protective layers in rigid magnetic disk.

scholarly journals Elastic Constants of Diamond-Like Carbon Films by Surface Brillouin Scattering

1999 ◽  
Vol 593 ◽  
Author(s):  
A.C. Ferrari ◽  
J. Robertson ◽  
R. Pastorelli ◽  
M.G. Beghi ◽  
C.E. Bottani
Keyword(s):  
Thin Films ◽  
Amorphous Carbon ◽  
Elastic Constants ◽  
Acoustic Waves ◽  
Brillouin Scattering ◽  
Surface Acoustic Waves ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Amorphous Carbon Films ◽  
Tetrahedral Amorphous Carbon

ABSTRACTThe elastic constants of thin Diamond-Like Carbon (DLC) films supply important information, but their measurement is difficult. Standard nanoindentation does not directly measure the elastic constants and has strong limitations particularly in the case of hard thin films on softer substrates, such as tetrahedral amorphous carbon on Si. Surface acoustic waves provide a better mean to investigate elastic properties. Surface Brillouin scattering (SBS) intrinsically probes acoustic waves of the wavelength which is appropriate to test the properties of films in the tens to hundreds of nanometers thickness range. SBS can be used to derive all the isotropic elastic constants of hard-on-soft and soft-on-hard amorphous carbon films of different kinds, with thickness down to less than 10 nm. The results help to resolve the previous uncertainties in mechanical data. The Young's modulus of tetrahedral amorphous carbon (ta-C) turns out to be lower than that of diamond, while the moduli of hydrogenated ta-C (ta-C:H) are considerably lower than those of ta-C because of the weakening effect of C-H bonding.

scholarly journals Elastic Constants of Diamond Like Carbon Films by Surface Brillouin Scattering

1999 ◽  
Vol 594 ◽  
Author(s):  
A. C. Ferrari ◽  
J. Robertson ◽  
R. Pastorelli ◽  
M. G. Beghi ◽  
C. E. Bottani
Keyword(s):  
Thin Films ◽  
Amorphous Carbon ◽  
Elastic Constants ◽  
Acoustic Waves ◽  
Brillouin Scattering ◽  
Surface Acoustic Waves ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Amorphous Carbon Films ◽  
Tetrahedral Amorphous Carbon

AbstractThe elastic constants of thin Diamond-Like Carbon (DLC) films supply important information, but their measurement is difficult. Standard nanoindentation does not directly measure the elastic constants and has strong limitations particularly in the case of hard thin films on softer substrates, such as tetrahedral amorphous carbon on Si. Surface acoustic waves provide a better mean to investigate elastic properties. Surface Brillouin scattering (SBS) intrinsically probes acoustic waves of the wavelength which is appropriate to test the properties of films in the tens to hundreds of nanometers thickness range. SBS can be used to derive all the isotropic elastic constants of hard-on-soft and soft-on-hard amorphous carbon films of different kinds, with thickness down to less than 10 nm. The results help to resolve the previous uncertainties in mechanical data. The Young's modulus of tetrahedral amorphous carbon (ta-C) turns out to be lower than that of diamond, while the moduli of hydrogenated ta-C (ta-C:H) are considerably lower than those of ta-C because of the weakening effect of C-H bonding.

Voids Investigation of Amorphous Carbon Films Deposited by DC-Magnetron Sputtering: A Small Angle x-ray Scattering and Gas Thermal Effusion Study

1999 ◽  
Vol 593 ◽  
Author(s):  
F.L. Freire ◽  
L.G. Jacobsohn ◽  
D.F. Franceschini ◽  
S.S. Camargo
Keyword(s):  
Magnetron Sputtering ◽  
Amorphous Carbon ◽  
Small Angle ◽  
Ion Beam ◽  
Carbon Films ◽  
Dc Magnetron Sputtering ◽  
Amorphous Carbon Films ◽  
X Ray ◽  
X Ray Scattering ◽  
Ray Scattering

ABSTRACTAmorphous carbon films were deposited onto (100) Si crystals and onto ultra-pure Al foils by dc-magnetron sputtering with different Ar plasma pressures, from 0.17 to 1.4 Pa. We investigate the voids structure and the voids density in these films by means of small angle x-ray scattering (SAXS) and mass spectrometry of effused gases. The analysis of the effusion spectra provided clear evidence that films deposited at lower pressures are compact, while the films deposited at higher pressure present a more open structural arrangement, confirming density results obtained by using ion beam techniques. SAXS results reveal that the fraction of open volumes increases with the plasma pressure: a direct correlation between film density and open volume fraction is found. These different film microstructures could be explained by the existence of different bombarding regimes during film growth

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