Atomic Structure of Interfaces in Epitaxial NiSi2 on (001) Silicon
Keyword(s):
ABSTRACTHigh resolution transmission electron microscopy (HRTEM) has been applied to study the atomic structure of NiSi2 /(001)Si interface. Previous HRTEM result suggested that Ni atoms in the boundary core are six-fold coordinated and Si atoms are everywhere tetrahedrally coordinated. In this work, high resolution imaging technique and computer image simulation were used to study the atomic structure of NiSi2 /(001)Si interfaces and a new interface structure was found. For the new interface structure, Ni and Si atoms are also six-fold and tetrahedrally coordinated, respectively, with an extra layer of fourfold planar bonded Si atoms present at the interface.
2005 ◽
Vol 187
(22)
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pp. 7619-7630
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2021 ◽
2007 ◽
Vol 558-559
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pp. 955-958