Characterization of InP/GaInAs Nanometer Sized Columns Produced by Aerosol Deposition and Plasma Etching

ABSTRACTWe present a technique for the fabrication of InP nano-columns and GaInAs/InP quantum-dots based on the use of sintered aerosol Ag particles as a mask in an electron cyclotron resonance etching process. The sintered particles have much more regular shapes than the unsintered ones used in previous studies and are more resistant to the etching environment, which results in the formation of more regular and reproducible structures. For example, we have been able to produce columns 100 nm in height which have an average diameter of 24 nm and a density of 109 cm−2.We have investigated the shape of the etched columns as a function of the Ag particles’ size, and characterized their electrical and optical properties using a combination of scanning electron microscopy, scanning tunneling microscopy, atomic force microscopy, and photoluminescence.