Nanocrystals and Quantum Dots Formed by High-Dose Ion Implantation
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AbstractIon implantation and thermal annealing have been used to produce a wide range of nanocrystals and quantum dots in amorphous (SiO2) and crystalline (AI2O3) matrices. Nanocrystals of metals (Au), elemental semiconductors (Si and Ge), and even compound semiconductors (SiGe, CdSe, CdS) have been produced. In amophous matrices, the nanocrystals are randomly oriented, but in crystalline matrices they are three dimensionally aligned. Evidence for photoluminescence and quantum confinement effects are presented.
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1998 ◽
Vol 23
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pp. 1103-1106
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2018 ◽
Vol 61
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pp. 490-496
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2014 ◽
Vol 6
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pp. 1158-1166
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2017 ◽
Vol 19
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pp. 1920-1926
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2017 ◽
Vol 254
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pp. 1700011
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2011 ◽
Vol 134
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pp. 024707
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2012 ◽
Vol 45
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pp. 105303
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