Preparation of Self-Patterned SrBi2Ta2O9 Thin Films from Photo-Sensitive Solutions
Keyword(s):
Gel Film
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AbstractPhoto-sensitive SrBi2Ta2O9 (SBT) solutions were evaluated and the patterning process flow for SBT films using the solutions was optimized. By adding a soft-bake process before UVirradiation, self-patterned SBT films were successfully prepared from the solutions and the cross sectional shape of the patterned films was improved. The photo-sensitivity of the solutions was estimated to be 900 mJ/cm2. The photo-reaction in the precursor gel film formed from the solution was traced by measuring IR absorption spectra. The obtained films had excellent ferroelectric properties comparable to conventional SBT films.
2005 ◽
Vol 33
(2)
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pp. 201-205
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1976 ◽
Vol 25
(3)
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pp. 1147-1150
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Keyword(s):
Keyword(s):
2019 ◽
Vol 159
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pp. 205-216
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1973 ◽
Vol 5
(1-3)
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pp. 233-243
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1970 ◽
Vol 6
(12)
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pp. 1568-1571
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