Determination of Pore Size Distributions in Nano-Porous Thin Films from Small Angle Scattering

2003 ◽  
Vol 766 ◽  
Author(s):  
Barry J. Bauer ◽  
Ronald C. Hedden ◽  
Hae-Jeong Lee ◽  
Christopher L. Soles ◽  
Da-Wei Liu

AbstractSmall angle neutron and x-ray scattering (SANS, SAXS) are powerful tools in determination of the pore size and content of nano-porous materials with low dielectric constants (low-k) that are being developed as interlevel dielectrics. Several models have been previously applied to fit the scattering data in order to extract information on the average pore and/or matrix size. A new method has been developed to provide information on the size distributions of the pore and matrix phases based on the “chord length distribution” introduced by Tchoubar and Mering. Examples are given of scattering from samples that have size distributions that are narrower and broader than the random distribution typical of scattering described by Debye, Anderson, and Brumberger. An example of fitting SANS data to a phase size distribution is given.

2002 ◽  
Vol 206 (1-3) ◽  
pp. 393-400 ◽  
Author(s):  
R.H López ◽  
A.M Vidales ◽  
G Zgrablich ◽  
F Rojas ◽  
I Kornhauser ◽  
...  

2002 ◽  
Vol 81 (12) ◽  
pp. 2232-2234 ◽  
Author(s):  
E. Huang ◽  
M. F. Toney ◽  
W. Volksen ◽  
D. Mecerreyes ◽  
P. Brock ◽  
...  

2008 ◽  
Vol 8 (2) ◽  
pp. 549-556 ◽  
Author(s):  
Asli Nalbant ◽  
Timur Dogu ◽  
Suna Balci

Nickel and copper incorporated MCM-41-like mesoporous nanocomposite materials prepared by the direct hydrothermal synthesis and the impregnation procedures showed highly attractive pore structure and surface area results for catalytic applications. The XRD patterns showed that characteristic MCM-41 structure was preserved for the materials synthesized following an impregnation procedure before the calcination step. The surface area of the Cu impregnated material with a quite high Cu/Si atomic ratio (0.19) was 631 m2/g. Very narrow pore size distributions with an average pore diameter of about 2.7 nm were obtained as a result of plugging of some of the smaller pores by Cu nanoballs. For lower metal to Si ratios (for instance for Ni/Si = 0.06) much higher surface area values (1130 m2/g) were obtained. In the case of nanocomposite materials synthesized by the direct hydrothermal route, MCM-41 structure was not destroyed for samples containing metal to Si atomic ratios as high as 0.12. In the case of materials containing Cu/Si and Ni/Si ratios over 0.2 wider pore size distributions and some decrease of surface area were observed.


2000 ◽  
Vol 37 (6) ◽  
pp. 1184-1194 ◽  
Author(s):  
Y Watabe ◽  
S Leroueil ◽  
J -P Le Bihan

The paper examines the hydraulic conductivity of a nonplastic till from northern Quebec. It is shown that the hydraulic conductivity is strongly influenced by the compaction degree of saturation, and the variation of hydraulic conductivity with void ratio is influenced by compaction conditions. Determination of pore-size distributions and microphotographs provide evidence that changes in hydraulic conductivity are related to the fabric of the compacted specimens and macroporosity developing when the soil is compacted at degrees of saturation less than that at the optimum.Key words: till, hydraulic conductivity, microfabric.


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