Transferwear During Cu CMP

2003 ◽  
Vol 767 ◽  
Author(s):  
H. Liang ◽  
G. Helen Xu ◽  
J.M. Martin ◽  
Th. Le Mongne

We conducted fundamental investigation of interfacial interactions between copper and polyurethane surfaces. Using in situ surface analysis techniques we were able to evaluate effects of water molecules on both materials surfaces during rubbing. Evidence of transferring elements between copper and urethane surfaces due to friction was found. Further investigation on pad wear indicated that transfer wear was taking a major role during copper CMP and mixed wear modes dominated pad wear.

2000 ◽  
Vol 613 ◽  
Author(s):  
Hong Liang

In this work, we used surface analysis techniques, such as a field-emission highresolution analytical TEM, X-ray spectroscopy, and XPS to analyze abrasive particles after polishing. Results showed evidence of copper oxide (Cu2O) in the polished slurry. However, there was no metallic crystalline copper detected. After comparing these data with the results obtained from our electro-chemical experiments, we propose two possible chemical wear mechanisms in Cu CMP.


1999 ◽  
Vol 65 (7) ◽  
pp. 2877-2894 ◽  
Author(s):  
Richard S. Pembrey ◽  
Kevin C. Marshall ◽  
René P. Schneider

ABSTRACT Cell surface analysis often requires manipulation of cells prior to examination. The most commonly employed procedures are centrifugation at different speeds, changes of media during washing or final resuspension, desiccation (either air drying for contact angle measurements or freeze-drying for sensitive spectroscopic analysis, such as X-ray photoelectron spectroscopy), and contact with hydrocarbon (hydrophobicity assays). The effects of these procedures on electrophoretic mobility, adhesion to solid substrata, affinity to a number of Sepharose columns, structural integrity, and cell viability were systematically investigated for a range of model organisms, including carbon- and nitrogen-limited Psychrobacter sp. strain SW8 (glycocalyx-bearing cells), Escherichia coli(gram-negative cells without a glycocalyx), and Staphylococcus epidermidis (gram-positive cells without a glycocalyx). All of the cell manipulation procedures severely modified the physicochemical properties of cells, but with each procedure some organisms were more susceptible than others. Considerable disruption of cell surfaces occurred when organisms were placed in contact with a hydrocarbon (hexadecane). The majority of cells became nonculturable after air drying and freeze-drying. Centrifugation at a high speed (15,000 × g) modified many cell surface parameters significantly, although cell viability was considerably affected only in E. coli. The type of washing or resuspension medium had a strong influence on the values of cell surface parameters, particularly when high-salt solutions were compared with low-salt buffers. The values for parameters obtained with different methods that allegedly measure similar cell surface properties did not correlate for most cells. These results demonstrate that the methods used to prepare cells for cell surface analysis need to be critically investigated for each microorganism so that the final results obtained reflect the nature of the in situ microbial cell surface as closely as possible. There is an urgent need for new, reliable, nondestructive, minimally manipulative cell surface analysis techniques that can be used in situ.


1991 ◽  
Vol 02 (C2) ◽  
pp. C2-185-C2-191
Author(s):  
P. A.C. GROENEN ◽  
J. G.A. HÖLSCHER ◽  
H. H. BRONGERSMA

2015 ◽  
Vol 64 (7) ◽  
pp. 285-288
Author(s):  
Kenji Nose ◽  
Mai Tomino

2009 ◽  
Vol 15 (S3) ◽  
pp. 87-88
Author(s):  
José A. R. Pacheco de Carvalho ◽  
Cláudia F. F. P. R. Pacheco ◽  
António D. Reis

AbstractMaterial analysis, specially surface analysis of materials, has been increasingly important. A wide range of surface analysis techniques is available. The techniques are, generally, complementary. There are nuclear and non-nuclear techniques, e.g. microscopy. Nuclear techniques, which are nondestructive, permit analysis for a few microns near the surface. They have been applied to areas such as scientific, technologic, industry, arts and medicine, using MeV ion beams. Nuclear reactions permit to achieve high sensitivities for detection of light elements in heavy substrates and also discrimination of isotopes. We use ion-ion nuclear reactions, elastic scattering and the energy analysis method, where an energy spectrum is obtained of ions from the target for a chosen energy of the incident ion beam. The target composition and concentration profile information contained in the spectrum is computationally obtained through a computer program that has been developed for predicting such energy spectra. Predicted spectra obtained for variations of target parameters are compared with experimental data, giving that information. SEM and TEM are also used.


1981 ◽  
Vol 18 (3) ◽  
pp. 960-964 ◽  
Author(s):  
L. L. Kazmerski ◽  
O. Jamjoum ◽  
P. J. Ireland ◽  
R. L. Whitney

1988 ◽  
Vol 22 (4) ◽  
pp. 463-467 ◽  
Author(s):  
Julia E. Fulghum ◽  
Scott R. Bryan ◽  
Richard W. Linton ◽  
Christopher F. Bauer ◽  
Dieter P. Griffis

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