Three-Dimensional Micro- and Nanofabrication with Multiphoton Absorption
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ABSTRACTMultiphoton absorption has become a powerful technique for the creation of three-dimensional micro- and nanostructures. Here we review some of our recent progress towards creating functional microdevices with multiphoton absorption. Specific thrusts of our research include development of new resins for multiphoton absorption polymerization, design of novel schemes for metal deposition, and post-fabrication ablation of polymeric structures.
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2014 ◽
Vol 372
(2007)
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pp. 20120509
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2015 ◽
Vol 21
(2)
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pp. 197-223
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2003 ◽
Vol 31
(2)
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pp. 122-128
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