Analysis of DC-Metal Contact RF MEMS Switch with Split Beam Structure for Wireless Application

2015 ◽  
Vol 5 (6) ◽  
pp. 379 ◽  
Author(s):  
R. Raman ◽  
T. Shanmuganantham
Keyword(s):  
Rf Mems ◽  
Metal Contact ◽  
Beam Structure ◽  
Rf Mems Switch ◽  
Mems Switch ◽  
Wireless Application

A Bulk RF MEMS Switch by Silicon-to-GaAs Bonding

2009 ◽  
Vol 60-61 ◽  
pp. 224-227
Author(s):  
Le Lu ◽  
Jian Zhu ◽  
Shi Xin Jian ◽  
Chen Chen
Keyword(s):  
Gallium Arsenide ◽  
Transmission Line ◽  
Wafer Bonding ◽  
Gaas Substrate ◽  
Rf Mems ◽  
Beam Structure ◽  
Rf Mems Switch ◽  
Mems Switch ◽  
Gaas Wafer ◽  
Electrode Contact

. A Bulk RF MEMS switch is present in this paper. The beam structure and transmission line are separated fabricated on silicon and gallium arsenide (GaAs) wafer. The beam structure, up electrode, contact and anchor are fabricated on the silicon wafer. And transmission line and down electrode are made on the GaAs substrate. Two parts of the switch are bonded together by wafer bonding using gold layer as seed. The total area of the switch is 600 um X 600 um.

A high-force and high isolation metal-contact RF MEMS switch

2017 ◽  
Vol 23 (10) ◽  
pp. 4699-4708 ◽  
Author(s):  
Peigang Deng ◽  
Ning Wang ◽  
Feng Cai ◽  
Longquan Chen
Keyword(s):  
Rf Mems ◽  
Metal Contact ◽  
Rf Mems Switch ◽  
High Isolation ◽  
Mems Switch

scholarly journals A micro level electrostatically actuated cantilever and metal contact based series RF MEMS switch for multi-band applications

2017 ◽  
Vol 4 (1) ◽  
pp. 1323367 ◽  
Author(s):  
T. Lakshmi Narayana ◽  
K. Girija Sravani ◽  
K. Srinivasa Rao ◽  
Kun Chen
Keyword(s):  
Rf Mems ◽  
Metal Contact ◽  
Rf Mems Switch ◽  
Electrostatically Actuated ◽  
Mems Switch ◽  
Micro Level ◽  
Multi Band

scholarly journals Cantilever Beam Metal-Contact MEMS Switch

2013 ◽  
Vol 2013 ◽  
pp. 1-4 ◽  
Author(s):  
Adel Saad Emhemmed ◽  
Abdulmagid A. Aburwein
Keyword(s):  
Cantilever Beam ◽  
Rf Mems ◽  
Spring Constant ◽  
Metal Contact ◽  
Rf Mems Switch ◽  
Microelectromechanical System ◽  
Mems Switch ◽  
Integrated Method ◽  
Beam Geometry ◽  
Contact Switch

We present a new design of a miniature RF microelectromechanical system (MEMS) metal-contact switch and investigate various aspects associated with lowering the pull-down voltage and overcoming the stiction problem. Lowering the pull-down voltage in this design is based on reducing the spring constant by changing the cantilever beam geometry of the RF MEMS switch, and the stiction problem is overcome by a simple integrated method using two tiny posts located on the substrate at the free end of the cantilever beam.

Improving performance of the metal-to-metal contact RF MEMS switch with a Pt–Au microspring contact design

2011 ◽  
Vol 21 (6) ◽  
pp. 065038 ◽  
Author(s):  
Bo Liu ◽  
Zhiqiu Lv ◽  
Xunjun He ◽  
Meng Liu ◽  
Yilong Hao ◽  
...  
Keyword(s):  
Rf Mems ◽  
Metal Contact ◽  
Rf Mems Switch ◽  
Mems Switch

A metal-to-metal contact RF MEMS switch towards handsets applications

2007 ◽  
Author(s):  
Tauno Vähä-Heikkilä ◽  
Pekka Rantakari
Keyword(s):  
Rf Mems ◽  
Metal Contact ◽  
Rf Mems Switch ◽  
Mems Switch
Sign in / Sign up

Export Citation Format

Share Document