High Resolution Medium Energy ion Scattering Analysis for Investigating UltraShallow Junction of Antimony Implanted in Conventional Silicon

Journal of Materials Science and Engineering A ◽

10.17265/2161-6213/2016.1-2.002 ◽

2016 ◽

Vol 6 (1) ◽

Author(s):

Talal H. Alzanki ◽

Kandil M. Kandil ◽

Chris Jeynes ◽

Brian J. Sealy ◽

Mohammad R. Alenezi ◽

...

Keyword(s):

High Resolution ◽

Medium Energy ◽

Ion Scattering ◽

Ultrashallow Junction ◽

Medium Energy Ion Scattering

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The structure of SrTiO3(001)-2 × 1 surface analyzed by high-resolution medium energy ion scattering coupled with ab initio calculations

The Journal of Chemical Physics ◽

10.1063/1.4811485 ◽

2013 ◽

Vol 138 (24) ◽

pp. 244705 ◽

Author(s):

Taishi Matsuda ◽

Yuki Yoshida ◽

Kei Mitsuhara ◽

Yoshiaki Kido

Keyword(s):

High Resolution ◽

Ab Initio Calculations ◽

Ab Initio ◽

Medium Energy ◽

Ion Scattering ◽

Medium Energy Ion Scattering

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Characterization of an ultrashallow junction structure using angle resolved x-ray photoelectron spectroscopy and medium energy ion scattering

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena ◽

10.1116/1.2834689 ◽

2008 ◽

Vol 26 (1) ◽

pp. 298 ◽

Author(s):

G. Saheli ◽

G. Conti ◽

Y. Uritsky ◽

M. A. Foad ◽

C. R. Brundle ◽

...

Keyword(s):

Photoelectron Spectroscopy ◽

Medium Energy ◽

Ion Scattering ◽

X Ray ◽

Ultrashallow Junction ◽

Medium Energy Ion Scattering ◽

Junction Structure

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Enhanced and correlated lattice vibrations of relaxed Cu(001) surface studied by high-resolution medium energy ion scattering

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2013.05.010 ◽

2013 ◽

Vol 308 ◽

pp. 100-108 ◽

Author(s):

Taishi Matsuda ◽

Yuta Aiba ◽

Jyunki Morimoto ◽

Kei Mitsuhara ◽

Yoshiaki Kido

Keyword(s):

High Resolution ◽

Lattice Vibrations ◽

Medium Energy ◽

Ion Scattering ◽

Medium Energy Ion Scattering

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Surface structure and dipole moments of RbI(001) determined by high-resolution medium-energy ion scattering

Journal of Physics Condensed Matter ◽

10.1088/0953-8984/13/44/301 ◽

2001 ◽

Vol 13 (44) ◽

pp. 9835-9845 ◽

Author(s):

T Okazawa ◽

Y Hoshino ◽

T Nishimura ◽

Y Kido

Keyword(s):

High Resolution ◽

Surface Structure ◽

Dipole Moments ◽

Medium Energy ◽

Ion Scattering ◽

Medium Energy Ion Scattering

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Rumpled relaxation of TiC(001) and TaC(001) determined by high-resolution medium-energy ion scattering spectroscopy

Physical Review B ◽

10.1103/physrevb.61.1748 ◽

2000 ◽

Vol 61 (3) ◽

pp. 1748-1751 ◽

Author(s):

Yoshiaki Kido ◽

Tomoaki Nishimura ◽

Yasushi Hoshino ◽

Shigeki Otani ◽

Ryutaro Souda

Keyword(s):

High Resolution ◽

Medium Energy ◽

Ion Scattering ◽

Ion Scattering Spectroscopy ◽

Medium Energy Ion Scattering

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Au(core)/Pd(shell) structures analyzed by high-resolution medium energy ion scattering

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2010.03.032 ◽

2010 ◽

Vol 268 (13) ◽

pp. 2281-2284 ◽

Author(s):

H. Matsumoto ◽

K. Mitsuhara ◽

A. Visikovskiy ◽

T. Akita ◽

N. Toshima ◽

...

Keyword(s):

High Resolution ◽

Shell Structures ◽

Medium Energy ◽

Ion Scattering ◽

Medium Energy Ion Scattering

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Lattice dynamics of RbI() surface studied by high-resolution medium energy ion scattering and molecular dynamics simulation

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(01)00580-8 ◽

2001 ◽

Vol 183 (1-2) ◽

pp. 108-115 ◽

Author(s):

T. Okazawa ◽

S. Ohno ◽

Y. Hoshino ◽

T. Nishimura ◽

Y. Kido

Keyword(s):

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

High Resolution ◽

Lattice Dynamics ◽

Dynamics Simulation ◽

Medium Energy ◽

Ion Scattering ◽

Medium Energy Ion Scattering

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High-resolution depth profiling of ultrathin gate oxides using medium-energy ion scattering

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(00)00619-4 ◽

2001 ◽

Vol 183 (1-2) ◽

pp. 146-153 ◽

Author(s):

T Gustafsson ◽

H.C Lu ◽

B.W Busch ◽

W.H Schulte ◽

E Garfunkel

Keyword(s):

High Resolution ◽

Depth Profiling ◽

Medium Energy ◽

Ion Scattering ◽

Gate Oxides ◽

Medium Energy Ion Scattering

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3C-SiC(001)-3×2 reconstructed surface analyzed by high-resolution medium energy ion scattering

Surface Science ◽

10.1016/j.susc.2012.08.021 ◽

2012 ◽

Vol 606 (23-24) ◽

pp. 1942-1947 ◽

Author(s):

T. Matsuda ◽

M. Tagami ◽

K. Mitsuhara ◽

A. Visikovskiy ◽

M. Shibuya ◽

...

Keyword(s):

High Resolution ◽

Medium Energy ◽

Ion Scattering ◽

Reconstructed Surface ◽

Medium Energy Ion Scattering

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Arsenic Plasma Doping in Si Characterized by High Resolution Medium Energy Ion Scattering Depth Profile Analysis

2018 22nd International Conference on Ion Implantation Technology (IIT) ◽

10.1109/iit.2018.8807964 ◽

2018 ◽

Author(s):

J. A. Van den Berg ◽

A. K. Rossall ◽

J. England

Keyword(s):

High Resolution ◽

Depth Profile ◽

Profile Analysis ◽

Medium Energy ◽

Ion Scattering ◽

Depth Profile Analysis ◽

Plasma Doping ◽

Medium Energy Ion Scattering

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