ABSTRACTA passive chemiresistor micro-sensor was investigated for the detection of hydrazine compounds. Hydrazine compounds are a highly toxic and carcinogenic species exhibiting toxic effects in humans at very low levels of exposure. Therefore, a sensor capable of detecting ppb levels of hydrazine compounds is required to insure the safety of personnel. The present study describes the fabrication, testing, and characterization of a low-cost, ultrasensitive Poly (3-Hexylthiophene) (P3HT) thin film-based micro-sensor for the detection of hydrazine compounds. Standard microelectronic manufacturing techniques were used to form a micro-sensor composed of a silicon substrate, interdigitated gold electrodes, and P3HT sensing film. Responses of the micro-sensor to hydrazine compounds at different temperatures and concentration levels are reported. When exposed to 25 ppm hydrazine in nitrogen, the sensor's resistance was measured to change from a few ohms to over 10 Megaohms. The thermal stability of the P3HT micro-sensor and the method to improve thermal stability are also explored. Thermally annealing the P3HT micro-sensor was found to improve thermal stability at high temperatures. Moreover, the sensor exhibits good specificity to hydrazine and does not respond to the presence of NO2 and/or N2O.
Design Of A Microelectronic Manufacturing Laboratory