Синтез наночастиц карбида кремния методом лазерного пиролиза смеси моносилана и ацетилена
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The conditions of the laser-enhanced synthesis reaction of silicon carbide nanoparticles are determined and the nanoparticles are characterized. The gas-phase reaction of laser synthesis of SiC particles is observed at SiH4/C2H2 flow ratio in the range of 1.6-3.2. The temperature in the reaction zone was ~1400--1500ºC. Silicon carbide nanoparticles ~6 nm in diameter are produced and their composition is studied.
1993 ◽
Vol 19
(6)
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pp. 407-413
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2004 ◽
Vol 84
(6)
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pp. 1236-1240
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2021 ◽
Vol 1
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pp. 51-57
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1983 ◽
Vol 92
(2)
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pp. L5-L7
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2019 ◽
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1989 ◽
Vol 24
(10)
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pp. 3679-3685
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1954 ◽
Vol 76
(18)
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pp. 4746-4747
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