In order to improve the quality of sample and decrease the stress during process, it is important to study the residual stress distribution during direct laser metal deposition (LMDS) process. In this paper, according to the “element life and death” technique of finite element method ,with APDL, we simulated the effects of Laser power, scanning velocity, substrate preheat temperature and powder addition speed in top layer of samples residual stress distribution during whole LMDS process are studied. The residual stress distribution under different process parameters is researched in detail. Using the same process parameters, the simulation results show good agreement with the features of sample which fabricated by LMDS.