Synthesis of hydrogenated amorphous carbon films with a line type atmospheric-pressure plasma CVD apparatus

2011 ◽  
Vol 206 (7) ◽  
pp. 2025-2029 ◽  
Author(s):  
Masaki Agemi ◽  
Kotaro Kayama ◽  
Mayui Noborisaka ◽  
Yohei Tachimoto ◽  
Akira Shirakura ◽  
...  
Keyword(s):  
Amorphous Carbon ◽  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Carbon Films ◽  
Plasma Cvd ◽  
Amorphous Carbon Films ◽  
Hydrogenated Amorphous Carbon ◽  
Pressure Plasma ◽  
Hydrogenated Amorphous ◽  
Line Type

Optical and Mechanical Properties of Hard Hydrogenated Amorphous Carbon Films Deposited by Plasma CVD

1990 ◽  
Vol 29 (Part 1, No. 12) ◽  
pp. 2815-2819 ◽  
Author(s):  
Haruki Yokoyama ◽  
Masaki Okamoto ◽  
Toshifumi Yamasaki ◽  
Katsumi Takahiro ◽  
Yukio Osaka ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Amorphous Carbon ◽  
Carbon Films ◽  
Plasma Cvd ◽  
Amorphous Carbon Films ◽  
Hydrogenated Amorphous Carbon ◽  
Optical And Mechanical Properties ◽  
Hydrogenated Amorphous
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