On the generalized VIP time integral methodology for transient thermal problems

Author(s):  
YOUPING MEI ◽  
XIAOQIN CHEN ◽  
KUMAR TAMMA ◽  
DESONG SHA
Author(s):  
Julia T. Luck ◽  
C. W. Boggs ◽  
S. J. Pennycook

The use of cross-sectional Transmission Electron Microscopy (TEM) has become invaluable for the characterization of the near-surface regions of semiconductors following ion-implantation and/or transient thermal processing. A fast and reliable technique is required which produces a large thin region while preserving the original sample surface. New analytical techniques, particularly the direct imaging of dopant distributions, also require good thickness uniformity. Two methods of ion milling are commonly used, and are compared below. The older method involves milling with a single gun from each side in turn, whereas a newer method uses two guns to mill from both sides simultaneously.


2019 ◽  
Vol 50 (17) ◽  
pp. 1721-1736
Author(s):  
Kaiqiang Hou ◽  
Xiaolong Weng ◽  
Wei Luo ◽  
Le Yuan ◽  
Wei Duan ◽  
...  

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