Work Function Tuning through Self-Assembling Monolayers of Fluorinated Molecules

2019 ◽  
Author(s):  
Laura Canil ◽  
Antonio Abate
Keyword(s):  
Work Function ◽  
Self Assembling ◽  
Work Function Tuning

Oxygen incorporation in TiN for metal gate work function tuning with a replacement gate integration approach

2010 ◽  
Vol 87 (9) ◽  
pp. 1805-1807 ◽  
Author(s):  
Zilan Li ◽  
Tom Schram ◽  
Thomas Witters ◽  
Joshua Tseng ◽  
Stefan De Gendt ◽  
...  
Keyword(s):  
Work Function ◽  
Metal Gate ◽  
Oxygen Incorporation ◽  
Integration Approach ◽  
Work Function Tuning ◽  
Gate Work Function

Bottom-up method for work function tuning in high-k/metal gate stacks in advanced CMOS technologies

2011 ◽  
Author(s):  
Mrunal A. Khaderbad ◽  
Rohit Pandharipande ◽  
Aradhana Gautam ◽  
Abhishek Mishra ◽  
Meenakshi Bhaisare ◽  
...  
Keyword(s):  
Work Function ◽  
Gate Stacks ◽  
Metal Gate ◽  
Bottom Up ◽  
High K ◽  
Work Function Tuning

Work function tuning of metal nitride electrodes for advanced CMOS devices

2006 ◽  
Vol 504 (1-2) ◽  
pp. 174-177 ◽  
Author(s):  
C. Ren ◽  
B.B. Faizhal ◽  
D.S.H. Chan ◽  
M.-F. Li ◽  
Y.-C. Yeo ◽  
...  
Keyword(s):  
Work Function ◽  
Metal Nitride ◽  
Work Function Tuning

Work function tuning at Au-HfO2 interfaces using organophosphonate monolayers

2016 ◽  
Vol 108 (19) ◽  
pp. 191607 ◽  
Author(s):  
Matthew Kwan ◽  
Thomas Cardinal ◽  
P. Hubert Mutin ◽  
Ganpati Ramanath
Keyword(s):  
Work Function ◽  
Work Function Tuning

Solution-Processed LiF for Work Function Tuning in Electrode Bilayers

Nano Letters ◽  
2011 ◽  
Vol 12 (1) ◽  
pp. 39-44 ◽  
Author(s):  
Taner Aytun ◽  
Ayse Turak ◽  
Iain Baikie ◽  
Grzegorz Halek ◽  
Cleva W. Ow-Yang
Keyword(s):  
Work Function ◽  
Solution Processed ◽  
Work Function Tuning
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