scholarly journals Fabrication of the CNx films by TPD sheet plasma source.

2002 ◽  
Vol 14 (1/2) ◽  
pp. 41-42
Author(s):  
Ken'ichiro ONA ◽  
Mitsuo IWASE ◽  
Akira TONEGAWA
Keyword(s):  
Plasma Source ◽  
Sheet Plasma ◽  
Cnx Films

Characterization of CNx films prepared by twinned ECR plasma source enhanced DC magnetron sputtering

2001 ◽  
Vol 390 (1-2) ◽  
pp. 107-112 ◽  
Author(s):  
Jun Xu ◽  
Xinlu Deng ◽  
Jialiang Zhang ◽  
Wenqi Lu ◽  
Tengcai Ma
Keyword(s):  
Magnetron Sputtering ◽  
Plasma Source ◽  
Dc Magnetron Sputtering ◽  
Ecr Plasma ◽  
Cnx Films

Characteristics of an E×B probe for extraction of H− ions from a magnetized sheet plasma source

2003 ◽  
Vol 74 (2) ◽  
pp. 951-955 ◽  
Author(s):  
Marko E. Arciaga ◽  
Alexander G. Mendenilla ◽  
Henry J. Ramos
Keyword(s):  
Plasma Source ◽  
Sheet Plasma

Nitride formation using a magnetized sheet plasma source

Vacuum ◽  
2002 ◽  
Vol 65 (3-4) ◽  
pp. 397-402 ◽  
Author(s):  
Henry J. Ramos ◽  
Rainier Awayan
Keyword(s):  
Plasma Source ◽  
Sheet Plasma ◽  
Nitride Formation

Production of sheet plasma using a TP-D plasma source

1996 ◽  
Vol 111 (1-2) ◽  
pp. 151-156 ◽  
Author(s):  
Katsuhiko Sunako ◽  
Kenzo Nanri ◽  
Takeshi Noguchi ◽  
Eiji Yabe ◽  
Kazuo Takayama
Keyword(s):  
Plasma Source ◽  
Sheet Plasma

Influence of Ar ion etching on Tc of liquid-quenched Bi1.6Pb0.4Sr2Ca2Cu3Ox superconductor by sheet plasma source

1996 ◽  
Vol 31 (11) ◽  
pp. 2893-2896
Author(s):  
Yoshitake Nishi ◽  
Hirokazu Ishii ◽  
Kageyoshi Sakamoto ◽  
Kazuya Oguri ◽  
Hisakuni Matsumoto ◽  
...  
Keyword(s):  
Plasma Source ◽  
Ion Etching ◽  
Sheet Plasma
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