RF SHEET-PLASMA SOURCE USING PERMANENT MAGNETS

Author(s):  
Youichi Sakawa ◽  
Kentaro Yano ◽  
Tatsuo Shoji
2019 ◽  
Vol 85 (3) ◽  
Author(s):  
Erik Varberg ◽  
Åshild Fredriksen

The work described in this article was carried out to investigate how permanent magnets (PM) affect the plasma confinement and ion beam properties in an inductively coupled plasma which expands from a helicon source. The cylindrical plasma device Njord has a 13 cm long and 20 cm wide stainless steel port connecting the source chamber and the diffusion chamber. The source chamber has an axial magnetic field produced by two coils, with magnetic field lines expanding into the diffusion chamber. Simulations have shown that the field lines leaving the edge of the source hit the port wall, causing a loss of electrons in this section. In the experiments performed in this work, PMs were added around the port walls near the exit of a plasma source and the effect was investigated experimentally by means of a retarding field energy analyser probe. The plasma potential, ion density and ion beam parameters were estimated, and the results with and without the PMs were compared. The results showed that the plasma density in the centre can in some cases be doubled, and the density at the edges of the plasma increased significantly with PMs in place. Although the plasma potential was slightly affected, and the beam velocity dropped by ${\sim}$ 10 %, the ion beam flux increased by a factor of 1.5.


2007 ◽  
Vol 49 (5A) ◽  
pp. A81-A93 ◽  
Author(s):  
Francis F Chen ◽  
Humberto Torreblanca

2011 ◽  
Vol 39 (11) ◽  
pp. 2440-2441 ◽  
Author(s):  
Yuki Itoh ◽  
Kazunori Takahashi ◽  
Tamiya Fujiwara

2018 ◽  
Vol 167 ◽  
pp. 04005 ◽  
Author(s):  
Giuseppe Costa ◽  
Lorenzo Torrisi

The charge particle emission form laser-generated plasma was studied experimentally and theoretically using the COMSOL simulation code. The particle acceleration was investigated using two lasers at two different regimes. A Nd:YAG laser, with 3 ns pulse duration and 1010 W/cm2 intensity, when focused on solid target produces a non-equilibrium plasma with average temperature of about 30-50 eV. An Iodine laser with 300 ps pulse duration and 1016 W/cm2 intensity produces plasmas with average temperatures of the order of tens keV. In both cases charge separation occurs and ions and electrons are accelerated at energies of the order of 200 eV and 1 MeV per charge state in the two cases, respectively. The simulation program permits to plot the charge particle trajectories from plasma source in vacuum indicating how they can be deflected by magnetic and electrical fields. The simulation code can be employed to realize suitable permanent magnets and solenoids to deflect ions toward a secondary target or detectors, to focalize ions and electrons, to realize electron traps able to provide significant ion acceleration and to realize efficient spectrometers. In particular it was applied to the study two Thomson parabola spectrometers able to detect ions at low and at high laser intensities. The comparisons between measurements and simulation is presented and discussed.


Shinku ◽  
1994 ◽  
Vol 37 (3) ◽  
pp. 316-318
Author(s):  
Takashi INOUE ◽  
Tadayoshi OGAWA ◽  
Wataru MIYAZAWA ◽  
Yukio OKAMOTO ◽  
Shoji DEN ◽  
...  

Shinku ◽  
1994 ◽  
Vol 37 (3) ◽  
pp. 312-315
Author(s):  
Takashi INOUE ◽  
Tadayoshi OGAWA ◽  
Wataru MIYAZAWA ◽  
Yukio OKAMOTO ◽  
Shoji DEN ◽  
...  

2002 ◽  
Vol 14 (1/2) ◽  
pp. 41-42
Author(s):  
Ken'ichiro ONA ◽  
Mitsuo IWASE ◽  
Akira TONEGAWA
Keyword(s):  

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