scholarly journals Copper Filling of Deep Sub-μm Through-Holes and Trenches by Using High-Vacuum Magnetron Sputtering and Supercritical Carbon Dioxide

2011 ◽  
Vol 54 (3) ◽  
pp. 173-176 ◽  
Author(s):  
Masatoshi ITOH ◽  
Tomonori NUMAKAWA ◽  
Yasunori OHNO ◽  
Masato TERASAKI ◽  
Yuuki MAEDA ◽  
...  
Keyword(s):  
Carbon Dioxide ◽  
Supercritical Carbon Dioxide ◽  
Magnetron Sputtering ◽  
High Vacuum ◽  
Supercritical Carbon

ATHLET extensions for the simulation of supercritical carbon dioxide driven power cycles

Kerntechnik ◽  
2019 ◽  
Vol 84 (5) ◽  
pp. 390-396 ◽  
Author(s):  
M. Hofer ◽  
M. Buck ◽  
J. Starflinger
Keyword(s):  
Carbon Dioxide ◽  
Supercritical Carbon Dioxide ◽  
Power Cycles ◽  
Supercritical Carbon
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