Copper Filling of Deep Submicrometer Trenches with Cobalt-Lined Barrier Metal Produced by High-Vacuum Magnetron Sputtering by Using supercritical Carbon Dioxide Method

2012 ◽  
Vol 55 (5) ◽  
pp. 237-240
Author(s):  
Yasunori OHNO ◽  
Masatoshi ITOH ◽  
Tomonori NUMAKAWA ◽  
Kota KAMIUTTANAI ◽  
Katsuto OTAKE ◽  
...  
Keyword(s):  
Carbon Dioxide ◽  
Supercritical Carbon Dioxide ◽  
Magnetron Sputtering ◽  
High Vacuum ◽  
Deep Submicrometer ◽  
Barrier Metal ◽  
Supercritical Carbon

scholarly journals Copper Filling of Deep Sub-μm Through-Holes and Trenches by Using High-Vacuum Magnetron Sputtering and Supercritical Carbon Dioxide

2011 ◽  
Vol 54 (3) ◽  
pp. 173-176 ◽  
Author(s):  
Masatoshi ITOH ◽  
Tomonori NUMAKAWA ◽  
Yasunori OHNO ◽  
Masato TERASAKI ◽  
Yuuki MAEDA ◽  
...  
Keyword(s):  
Carbon Dioxide ◽  
Supercritical Carbon Dioxide ◽  
Magnetron Sputtering ◽  
High Vacuum ◽  
Supercritical Carbon
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