Acoustic and Photoacoustic Inspection of Through-Silicon Vias in the GHz-Frequency Band
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Abstract Through Silicon Via (TSV) is the most promising technology for vertical interconnection in novel three-dimensional chip architectures. Reliability and quality assessment necessary for process development and manufacturing require appropriate non-destructive testing techniques to detect cracks and delamination defects with sufficient penetration and imaging capabilities. The current paper presents the application of two acoustically based methods operating in the GHz-frequency band for the assessment of the integrity of TSV structures.
2017 ◽
Vol 148
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pp. 621-638
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2011 ◽
Vol 22
(12)
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pp. 927-940
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2015 ◽
pp. 227-233
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Keyword(s):
Analysis of non-destructive testing of three-dimensional braided composites using scanning SQUID NDT
2014 ◽
Vol 56
(5)
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pp. 246-251
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