scholarly journals Metrological studies of the characteristics of multilayer surface coatings using synchrotron radiation

Author(s):  
A. S. Sigov ◽  
O. A. Minaeva ◽  
S. I. Anevsky ◽  
A. M. Lebedev ◽  
R. V. Minaev

The investigations of multilayer surface nanostructures characteristics was performed with synchrotron radiation sources, characterized by an intensive, calculated continuum. It plays an important role in nanoelectronics metrological base. The main research were carried out at electron storage rings «Siberia-1» (Kurchatov Institute) and MLS (PTB, Berlin) with low electron energy, in a wide wavelength range, including visible range, AUV, VU, EUV and to exclude the X-ray radiation influence. The methods of the radiometers, photodiodes, filters and multilayer mirrors characteristics measurements are based on the synchrotron  radiation  absolute spectral characteristics and accelerated electrons number variation. The metrological investigations with synchrotron radiation was concentrated on: – absolute spectral responsivety of silicon photodiodes with multilayer filters for integral radiometers applications; – spectral transmittances of surface layers of photodiodes in the extreme ultraviolet region; – spectral reflectance coefficient of superlattice. The characteristics of photodiodes and filters on a synchrotron radiation source are measured using a monochromator and a reference detector. The use of a synchrotron radiation channel makes it possible to study the spectral transmittance of thin films and multilayer structures formed in the in situ mode. To form multilayer nanostructures directly on the receiving surface of photodetectors, an ion-plasma sputtering module is used. The optical scheme of the channel provides for the possibility of using monochromators of grazing incidence for the range of photon energies from 25 to 100 ev and normal incidence for the range of photon energies from 4 to 25 ev. At a photon energy of 40 ev, the absolute spectral sensitivity was 70 ma / W for a photodiode with a surface multilayer filter applied. To develop an experimental technique for measuring the spectral reflection coefficient of multilayer mirrors, and to create standard samples, the Mo/Si  system was studied. Computer modeling of multi-layer coatings allows us to calculate the optical characteristics of superlattices in the extreme ultraviolet region. The obtained results of measurements of the spectral reflection coefficient of a multilayer coating in the photon energy range of 65–100 ev indicate a resonance reflection character with a max-imum at an energy of 83.5 ev and an energy width at a half-height of about 6.5 ev. The working wave-length of the reflecting mirror corresponds to the calculated one, which confirms the effectiveness of the adopted model.

2010 ◽  
Author(s):  
Fengli Wang ◽  
Lei Liu ◽  
Jingtao Zhu ◽  
Zhong Zhang ◽  
Wenbin Li ◽  
...  

2021 ◽  
Vol 91 (10) ◽  
pp. 1524
Author(s):  
А.А. Ахсахалян ◽  
С.А. Гарахин ◽  
Ф.А. Дарьин ◽  
М.В. Зорина ◽  
В.В. Кривенцов ◽  
...  

The work is devoted to the development, fabrication and analysis of broadband W / Si multilayer mirrors for a broadband monochromator, calculated for the spectral range of 7–10 keV. The possibility of using the stacking approach to obtain multilayer mirrors with a reflection coefficient of about 30% and a spectral bandwidth ΔE / E of about 20% is shown. The results of measurements of the angular and spectral reflection curves of the mirror obtained on a laboratory diffractometer and on a synchrotron in Novosibirsk are presented.


1994 ◽  
Vol 33 (25) ◽  
pp. 5902 ◽  
Author(s):  
G. E. Holland ◽  
J. F. Seely ◽  
R. P. McCoy ◽  
K. F. Dymond ◽  
C. Rollins ◽  
...  

2018 ◽  
Vol 124 (1) ◽  
pp. 015901 ◽  
Author(s):  
Khoa Anh Tran ◽  
Khuong Ba Dinh ◽  
Peter Hannaford ◽  
Lap Van Dao

2010 ◽  
Vol 30 (10) ◽  
pp. 2849-2854 ◽  
Author(s):  
卢增雄 Lu Zengxiong ◽  
金春水 Jin Chunshui ◽  
张立超 Zhang Lichao ◽  
王丽萍 Wang Liping

1989 ◽  
Vol 44 (1) ◽  
pp. 17-20 ◽  
Author(s):  
G. Hagenow ◽  
H.-W. Jochims ◽  
J. Sawatzki ◽  
R. Minkwitz ◽  
H. Baumgärtel

Abstract The ionization potential of CH3SCF3 and the appearance potentials of fragment ions have been measured in the photon energy range 9 -19 eV using synchrotron, radiation. From these results thermochemical data of CH3SCF3, CH3SCF3+ and fragment ions have been evaluated.


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