Broadband Anti-Reflection Coatings Fabricated by Precise Time-Controlled and Oblique-Angle Deposition Methods

Broadband anti-reflection (AR) coatings are essential elements for improving the photocurrent generation of photovoltaic modules and enhancing visibility in optical devices. In this paper, we report a hybrid-structured, anti-reflection coating that combines multi-layer thin films with a single top-oblique deposited layer. By simply introducing this low-refractive index layer, the broadband anti-reflection properties of optical thin films can be improved while simplifying the preparation. Precise time-controlled and oblique-angle deposition (OAD) methods were used to fabricate the broadband AR coating. By accurately measuring and adjusting the design errors for the thin and thick film layers, 22-layer and 36-layer AR coatings on a sapphire substrate with a 400–2000 nm wideband were obtained. This bottom-up preparation process and AR coating design have the potential to significantly enhance the broadband antireflective properties for many optical systems and reduce the manufacturing cost of broadband AR coatings.

Download Full-text

Effects of sputtering power and pressure on properties of ZnO:Ga thin films prepared by oblique-angle deposition

Thin Solid Films ◽

10.1016/j.tsf.2011.06.073 ◽

2011 ◽

Vol 520 (4) ◽

pp. 1233-1237 ◽

Cited By ~ 11

Author(s):

S. Flickyngerová ◽

M. Netrvalová ◽

P. Šutta ◽

I. Novotný ◽

V. Tvarožek ◽

...

Keyword(s):

Thin Films ◽

Oblique Angle Deposition ◽

Oblique Angle ◽

Sputtering Power ◽

Angle Deposition

Download Full-text

Nanostructure optimization of Zr-W-Ti metallic glass thin films via multitarget co-sputtering with oblique angle deposition approach

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2021.161265 ◽

2021 ◽

pp. 161265

Author(s):

Rattanachai Kowong ◽

Somyod Denchitcharoen ◽

Tossaporn Lertvanithphol ◽

Narit Triamnak ◽

Chanunthorn Chananonnawathorn ◽

...

Keyword(s):

Thin Films ◽

Metallic Glass ◽

Oblique Angle Deposition ◽

Oblique Angle ◽

Angle Deposition

Download Full-text

Polarization Conversion of Anisotropic SiO2 Columnar Thin Films Prepared by Using Oblique Angle Deposition

Journal of the Korean Physical Society ◽

10.3938/jkps.58.1026 ◽

2011 ◽

Vol 58 (4(2)) ◽

pp. 1026-1030 ◽

Cited By ~ 1

Author(s):

Yu Zou ◽

Jin Joo Kim ◽

Yong Jun Park ◽

Ji Bum Kim ◽

Young Deung Kim ◽

...

Keyword(s):

Thin Films ◽

Polarization Conversion ◽

Oblique Angle Deposition ◽

Oblique Angle ◽

Angle Deposition

Download Full-text

(Invited) Plasma Assisted Oblique Angle Deposition of Transparent and Conductive in-Plane Anisotropic ITO Thin Films

ECS Meeting Abstracts ◽

10.1149/ma2017-01/17/1011 ◽

2017 ◽

Keyword(s):

Thin Films ◽

Oblique Angle Deposition ◽

Oblique Angle ◽

Ito Thin Films ◽

Angle Deposition

Download Full-text

Oblique angle deposition of TiO2 thin films prepared by electron-beam evaporation

Applied Surface Science ◽

10.1016/j.apsusc.2010.08.038 ◽

2010 ◽

Vol 257 (4) ◽

pp. 1149-1153 ◽

Cited By ~ 30

Author(s):

Min Wook Pyun ◽

Eui Jung Kim ◽

Dae-Hwang Yoo ◽

Sung Hong Hahn

Keyword(s):

Thin Films ◽

Electron Beam ◽

Electron Beam Evaporation ◽

Oblique Angle Deposition ◽

Oblique Angle ◽

Tio2 Thin Films ◽

Angle Deposition

Download Full-text

Microstructure and Optical Properties of Sm3+ Doped TiO2 Thin Films by Oblique Angle Deposition

Integrated Ferroelectrics ◽

10.1080/10584587.2011.576950 ◽

2011 ◽

Vol 129 (1) ◽

pp. 201-207

Author(s):

Xiudi Xiao ◽

Lei Miao ◽

Gang Xu ◽

Jianda Shao ◽

Zhengxiu Fan

Keyword(s):

Thin Films ◽

Optical Properties ◽

Oblique Angle Deposition ◽

Oblique Angle ◽

Tio2 Thin Films ◽

Doped Tio2 ◽

Angle Deposition

Download Full-text

Vapor Phase Sensing Using Metal Nanorod Thin Films Grown by Cryogenic Oblique Angle Deposition

Journal of Sensors ◽

10.1155/2013/823041 ◽

2013 ◽

Vol 2013 ◽

pp. 1-6 ◽

Cited By ~ 1

Author(s):

Piyush Shah ◽

Dongquan Ju ◽

Xiaoxu Niu ◽

Andrew M. Sarangan

Keyword(s):

Thin Films ◽

Vapor Phase ◽

Oblique Angle Deposition ◽

Oblique Angle ◽

Surface Enhanced ◽

Surface Enhanced Raman ◽

Enhanced Raman Scattering ◽

Comsol Simulation ◽

Angle Deposition ◽

Good Agreement

We demonstrate the chemical sensing capability of silver nanostructured films grown by cryogenic oblique angle deposition (OAD). For comparison, the films are grown side by side at cryogenic (~100 K) and at room temperature (~300 K) by e-beam evaporation. Based on the observed structural differences, it was hypothesized that the cryogenic OAD silver films should show an increased surface enhanced Raman scattering (SERS) sensitivity. COMSOL simulation results are presented to validate this hypothesis. Experimental SERS results of 4-aminobenzenethiol (4-ABT) Raman test probe molecules in vapor phase show good agreement with the simulation and indicate promising SERS applications for these nanostructured thin films.

Download Full-text

“Enhanced Layer Coverage of Thin Films by Oblique Angle Deposition”

MRS Proceedings ◽

10.1557/proc-859-jj9.5 ◽

2004 ◽

Vol 859 ◽

Author(s):

Tansel Karabacak ◽

Gwo-Ching Wang ◽

Toh-Ming Lu

Keyword(s):

Thin Films ◽

Surface Diffusion ◽

Kinetic Monte Carlo ◽

Monte Carlo Algorithm ◽

Oblique Angle Deposition ◽

Oblique Angle ◽

Island Growth ◽

Average Growth ◽

Substrate Rotation ◽

Angle Deposition

ABSTRACTThe characteristics of nucleation and island growth in oblique angle deposition with substrate rotation have recently attracted interest due to the formation of novel 3D nanostructures by a physical self-assembly process. In this study, we present the results of a solid-on-solid growth simulation by a kinetic Monte Carlo algorithm that explores the layer coverage evolution of thin films during oblique angle deposition. The simulations accounted for oblique incidence flux, shadowing effect, surface diffusion, and substrate rotation. The layer coverage, the ratio of average island volume to average island size, and root-mean-square (RMS) roughness values are reported for the initial stages of island growth from submonolayer thicknesses up to a few monolayers. RMS roughness was also investigated for later stages of the growth. Our results show that, for small deposition angles and with limited or no surface diffusion included, the average growth rate of islands is faster in lateral directions that results in enhanced layer coverages and smoother films. This is due to that the sides of the islands can be exposed to the incident flux more effectively at small deposition angles. On the other hand, normal incidence and high oblique angle depositions give poorer layer coverages and much rougher films due to the slower growth rates in lateral directions.

Download Full-text