scholarly journals Simultaneous Detection of Relative Humidity and Temperature Based on Silicon On-Chip Cascaded Photonic Crystal Nanobeam Cavities

Crystals ◽  
2021 ◽  
Vol 11 (12) ◽  
pp. 1559
Author(s):  
Lun Ye ◽  
Xiao Liu ◽  
Danyang Pei ◽  
Jing Peng ◽  
Shuchang Liu ◽  
...  

In this paper, we propose and numerically demonstrate a novel cascaded silicon-on-insulator (SOI) photonic crystal nanobeam cavity (PCNC) dual-parameter sensor for the simultaneous detection of relative humidity (RH) and temperature. The structure consists of two independent PCNCs supporting two different resonant modes: a dielectric-mode and an air-mode, respectively. The dielectric-mode nanobeam cavities (cav1) are covered with SU-8 cladding to increase the sensitivity ratio contrast between RH sensing and temperature sensing. The air-mode nanobeam cavities (cav2) are coated with a water-absorbing polyvinyl-alcohol (PVA) layer that converts the change in RH into a change in refractive index (RI) under different ambient RH levels, thereby inducing a wavelength shift. Due to the positive thermo-optic (TO) coefficient of silicon and the negative TO coefficient of SU-8 cladding, the wavelength responses take the form of a red shift for cav2 and a blue shift for cav1 as the ambient temperature increases. By using 3D finite-difference time-domain (3D-FDTD) simulations, we prove the feasibility of simultaneous sensing by monitoring a single output transmission spectrum and applying the sensor matrix. For cav1, the RH and temperature sensitivities are 0 pm/%RH and −37.9 pm/K, while those of cav2 are −389.2 pm/%RH and 58.6 pm/K. The sensitivity ratios of temperature and RH are −1.5 and 0, respectively, which is the reason for designing two different resonant modes and also implies great potential for realizing dual-parameter sensing detection. In particular, it is also noteworthy that we demonstrate the ability of the dual-parameter sensor to resist external interference by using the dual wavelength matrix method. The maximum RH and temperature detection errors caused by the deviation of resonance wavelength 1 pm are only 0.006% RH and 0.026 K, which indicates that it achieves an excellent anti-interference ability. Furthermore, the structure is very compact, occupying only 32 μm × 4 μm (length × width). Hence, the proposed sensor shows promising prospects for compact lab-on-chip integrated sensor arrays and sensing with multiple parameters.

Nanophotonics ◽  
2021 ◽  
Vol 0 (0) ◽  
Author(s):  
Ali Rostamian ◽  
Ehsan Madadi-Kandjani ◽  
Hamed Dalir ◽  
Volker J. Sorger ◽  
Ray T. Chen

Abstract Thanks to the unique molecular fingerprints in the mid-infrared spectral region, absorption spectroscopy in this regime has attracted widespread attention in recent years. Contrary to commercially available infrared spectrometers, which are limited by being bulky and cost-intensive, laboratory-on-chip infrared spectrometers can offer sensor advancements including raw sensing performance in addition to use such as enhanced portability. Several platforms have been proposed in the past for on-chip ethanol detection. However, selective sensing with high sensitivity at room temperature has remained a challenge. Here, we experimentally demonstrate an on-chip ethyl alcohol sensor based on a holey photonic crystal waveguide on silicon on insulator-based photonics sensing platform offering an enhanced photoabsorption thus improving sensitivity. This is achieved by designing and engineering an optical slow-light mode with a high group-index of n g  = 73 and a strong localization of modal power in analyte, enabled by the photonic crystal waveguide structure. This approach includes a codesign paradigm that uniquely features an increased effective path length traversed by the guided wave through the to-be-sensed gas analyte. This PIC-based lab-on-chip sensor is exemplary, spectrally designed to operate at the center wavelength of 3.4 μm to match the peak absorbance for ethanol. However, the slow-light enhancement concept is universal offering to cover a wide design-window and spectral ranges towards sensing a plurality of gas species. Using the holey photonic crystal waveguide, we demonstrate the capability of achieving parts per billion levels of gas detection precision. High sensitivity combined with tailorable spectral range along with a compact form-factor enables a new class of portable photonic sensor platforms when combined with integrated with quantum cascade laser and detectors.


Crystals ◽  
2019 ◽  
Vol 9 (2) ◽  
pp. 57 ◽  
Author(s):  
Lin Ren ◽  
Yunpeng Li ◽  
Na Li ◽  
Chao Chen

Particle trapping and sensing serve as important tools for non-invasive studies of individual molecule or cell in bio-photonics. For such applications, it is required that the optical power to trap and detect particles is as low as possible, since large optical power would have side effects on biological particles. In this work, we proposed to deploy a nanobeam photonic crystal cavity for particle trapping and opto-mechanical sensing. For particles captured at 300 K, the input optical power was predicted to be as low as 48.8 μW by calculating the optical force and potential of a polystyrene particle with a radius of 150 nm when the trapping cavity was set in an aqueous environment. Moreover, both the optical and mechanical frequency shifts for particles with different sizes were calculated, which can be detected and distinguished by the optomechanical coupling between the particle and the designed cavity. The relative variation of the mechanical frequency achieved approximately 400%, which indicated better particle sensing compared with the variation of the optical frequency (±0.06%). Therefore, our proposed cavity shows promising potential as functional components in future particle trapping and manipulating applications in lab-on-chip.


Micromachines ◽  
2018 ◽  
Vol 9 (11) ◽  
pp. 541 ◽  
Author(s):  
Qifeng Qiao ◽  
Ji Xia ◽  
Chengkuo Lee ◽  
Guangya Zhou

In recent years, there has been growing interest in optical sensors based on microcavities due to their advantages of size reduction and enhanced sensing capability. In this paper, we aim to give a comprehensive review of the field of photonic crystal nanobeam cavity-based sensors. The sensing principles and development of applications, such as refractive index sensing, nanoparticle sensing, optomechanical sensing, and temperature sensing, are summarized and highlighted. From the studies reported, it is demonstrated that photonic crystal nanobeam cavities, which provide excellent light confinement capability, ultra-small size, flexible on-chip design, and easy integration, offer promising platforms for a range of sensing applications.


2016 ◽  
Vol 41 (6) ◽  
pp. 1197 ◽  
Author(s):  
Xingwang Zhang ◽  
Guangya Zhou ◽  
Peng Shi ◽  
Han Du ◽  
Tong Lin ◽  
...  

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