scholarly journals Optimization of the Ablative Laser Cutting of Shadow Mask for Organic FET Electrode Fabrication

Electronics ◽  
2020 ◽  
Vol 9 (12) ◽  
pp. 2184
Author(s):  
Mariusz Tomczyk ◽  
Paweł Kubik ◽  
Witold Waliszewski

This article presents an ablative method of cutting masks from ultra-thin metal foils using nanosecond laser pulses. As a source of laser radiation, a pulsed fiber laser with a wavelength of 1062 nm with the duration of pulses from 15 to 220 nanoseconds (ns), was used in the research. The masks were made of stainless-steel foil with thicknesses of 30 µm, 35 µm, and 120 µm. Channels of different lengths from 50 to 300 µm were tested. The possibilities and limitations of the presented method are described. The optimization of the cutting process parameters was performed using the experiment planning techniques. A static, determined complete two-level plan (SP/DC 24) was used. On the basis of the analysis of the test structures, we designed and produced precise shading masks used in the process of organic field effect transistor (OFET) electrode evaporation. The ablative method proved suitable to produce masks with canals of minimum lengths of 70 µm. It offers facile, fast, and economically viable shadow mask fabrication for organic electronics applications, which moreover might enable fast prototyping and circuit design.

2010 ◽  
Vol 97-101 ◽  
pp. 3803-3806
Author(s):  
Yong Xiang Hu ◽  
Heng Zhang ◽  
Zheng Qiang Yao

Laser interference micro-structuring is a relatively efficient and cost-effective technique for fabricating periodical micro-nano-structuring surfaces. The direct fabrication of sub-micron sized dot array on silicon was performed by four interfering nanosecond laser beams with a diffractive beam splitter. The mechanism to form the dot array was analyzed and it was found that the obtained conical dot array had a negative shape of the interference pattern of four laser beams. A second-order peak between two first-order peaks also occurred due to the liquid-solid expansion.


2020 ◽  
Vol 21 (2) ◽  
pp. 215-218
Author(s):  
I. A. Mohylyak ◽  
O. Yu. Bonchyk ◽  
S. A. Korniy ◽  
S. G. Kiyak ◽  
D. I. Popovych

Experimental studies of the features of the formation of laser-induced periodic nanostructures on the surface of silicon wafers in the zones of action of second, millisecond and nanosecond laser pulses are conducted in the work. The results of microscopic investigations by optical and electron microscopes of periodic structures formed on surfaces with crystallographic orientation (111), (100) are presented. The obtained results can be used to optimize the laser pulse mode for controlled micro- nanostructuring of the semiconductor surface.


Sign in / Sign up

Export Citation Format

Share Document