scholarly journals Road to Acquisition: Preparing a MEMS Microphone Array for Measurement of Fuselage Surface Pressure Fluctuations

Micromachines ◽  
2021 ◽  
Vol 12 (8) ◽  
pp. 961
Author(s):  
Thomas Ahlefeldt ◽  
Stefan Haxter ◽  
Carsten Spehr ◽  
Daniel Ernst ◽  
Tobias Kleindienst

Preparing and pre-testing experimental setups for flight tests is a lengthy but necessary task. One part of this preparation is comparing newly available measurement technology with proven setups. In our case, we wanted to compare acoustic Micro-Electro-Mechanical Systems (MEMS) to large and proven surface-mounted condenser microphones. The task started with the comparison of spectra in low-speed wind tunnel environments. After successful completion, the challenge was increased to similar comparisons in a transonic wind tunnel. The final goal of performing in-flight measurements on the outside fuselage of a twin-engine turboprop aircraft was eventually achieved using a slim array of 45 MEMS microphones with additional large microphones installed on the same carrier to drawn on for comparison. Finally, the array arrangement of MEMS microphones allowed for a complex study of fuselage surface pressure fluctuations in the wavenumber domain. The study indicates that MEMS microphones are an inexpensive alternative to conventional microphones with increased potential for spatially high-resolved measurements even at challenging experimental conditions during flight tests.

2007 ◽  
Vol 1034 ◽  
Author(s):  
Sung Q Lee ◽  
Hye Jin Kim ◽  
Sang Kyun Lee ◽  
Jae Woo Lee ◽  
Kang Ho Park

AbstractThe MEMS (micro-electro-mechanical systems) microphone enables the manufacturing of small mechanical components on the surface of a silicon wafer. The MEMS microphones are less susceptible to vibration because of the smaller diaphragm mass and an excellent candidate for chip-scale packaging. In this paper, we present a piezoelectric MEMS microphone based on (1-x)Pb(Mg1/3Nb2/3)O3-xPbTiO3 (PMN-PT) single crystal diaphragm. The PMN-PT materials exhibit extremely high piezoelectric coefficients and other desirable properties for an acoustic sensor. The piezoelectric-based microphone can offer the ability to passively sense without the power requirements. In particular, this paper introduces the design of a PMN-PT single crystal diaphragm with interdigitated electrode. We were able to fabricate miniaturized PMN-PT single crystal diaphragms. The fabricated sensor exhibits the sensitivity of 1.5mV/Pa. This implies that the PMN-PT thin film microphone has a potential of excellent acoustic characteristics.


2019 ◽  
Vol 2019 (0) ◽  
pp. IS-01
Author(s):  
Yasuhiko OKUTSU ◽  
Takao UNOGUCHI ◽  
Naoki HAMAMOTO ◽  
Kenta MIZUSHIRI ◽  
Xifeng WANG ◽  
...  

2020 ◽  
Vol 99 ◽  
pp. 105772 ◽  
Author(s):  
R. Camussi ◽  
A. Di Marco ◽  
C. Stoica ◽  
M. Bernardini ◽  
F. Stella ◽  
...  

AIAA Journal ◽  
2000 ◽  
Vol 38 ◽  
pp. 266-274
Author(s):  
Michael C. Goody ◽  
Roger L. Simpson ◽  
Christopher J. Chesnakas

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