scholarly journals Influence of the Surface Roughness of a Silicon Disk Resonator on Its Q-Factor

Photonics ◽  
2021 ◽  
Vol 8 (6) ◽  
pp. 225
Author(s):  
A. V. Yakuhina ◽  
A. S. Kadochkin ◽  
D. V. Gorelov ◽  
V. V. Svetukhin ◽  
S. S. Generalov ◽  
...  

This article presents a silicon disk resonator of the whispering-gallery-mode (WGM) type. The calculated Q-factor of the silicon WGM resonator was 107. Two methods of studying the surface roughness of a silicon WGM resonator with a nonlinear profile by means of Helios 650 scanning electron microscope and Bruker atomic force microscope (AFM) are presented. The results obtained by the two methods agreed well with each other. A comparison of the surface roughness values of WGM resonators manufactured using different technological approaches is presented. Based on the obtained data, a preliminary estimated Q-factor calculation of the resonators was performed, which was refined by numerical calculation using the finite-difference time-domain (FDTD) method. The effect of the surface roughness of the resonator on its Q-factor was found. Reducing the surface roughness of the resonator from 30 nm to 1–2 nm led to an increase in its Q-factor from 104 to 107.

Author(s):  
Seongjae Cho ◽  
Sukmo Koo ◽  
Kyungwan Yoo ◽  
Evan R. Pickett ◽  
Namkyoo Park ◽  
...  

2020 ◽  
Vol 238 ◽  
pp. 01006
Author(s):  
Arne Behrens ◽  
Martí Bosch ◽  
Martina Hentschel ◽  
Stefan Sinzinger

We report the design and optimized fabrication of deformed whispering gallery mode resonators in silica with solely ICP-RIE. This allows us to control the morphology of the resonators more freely and results in low surface roughness. The light was coupled into the resonator using a state of the art tapered fiber approach and we determined the Q-factor in the range of 105


2010 ◽  
Vol 19 (04) ◽  
pp. 811-817
Author(s):  
KENZO YAMAGUCHI ◽  
MASAMITSU FUJII ◽  
MITSUO FUKUDA

The three-dimensional finite-difference time-domain method was used to demonstrate a novel structure for coupling whispering gallery mode (WGM) with surface plasmons (SPs). As for this structure, a micrometer-sized optical resonator composed of a silver film coated on a silica microsphere containing apertures is set on a glass substrate. The SPs couple with higher-order WGM, and their intensity is clearly enhanced by this structure.


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