Atomic Layer Etching of Silicon Using a Ar Neutral Beam of Low Energy
2006 ◽
Vol 16
(4)
◽
pp. 213-217
Chang-Kwon Oh
◽
Sang-Duk Park
◽
Geun-Young Yeom
2014 ◽
Vol 105
(9)
◽
pp. 093104
◽
Young I. Jhon
◽
Kyung S. Min
◽
G. Y. Yeom
◽
Young Min Jhon
2006 ◽
Vol 89
(4)
◽
pp. 043109
◽
S. D. Park
◽
C. K. Oh
◽
J. W. Bae
◽
G. Y. Yeom
◽
T. W. Kim
◽
...
K.S. Min
◽
C. Y. Kang
◽
C. Park
◽
C. S. Park
◽
B. J. Park
◽
...
2008 ◽
Vol 11
(4)
◽
pp. H71
◽
S. D. Park
◽
W. S. Lim
◽
B. J. Park
◽
H. C. Lee
◽
J. W. Bae
◽
...
2005 ◽
Vol 8
(8)
◽
pp. C106
◽
S. D. Park
◽
D. H. Lee
◽
G. Y. Yeom
2020 ◽
Vol 38
(3)
◽
pp. 032603
Daisuke Ohori
◽
Takahiro Sawada
◽
Kenta Sugawara
◽
Masaya Okada
◽
Ken Nakata
◽
...
1994 ◽
Vol 82-83
◽
pp. 422-427
◽
Koji Suzue
◽
Takashi Matsuura
◽
Junichi Murota
◽
Yasuji Sawada
◽
Tadahiro Ohmi
2009 ◽
Vol 54
(3)
◽
pp. 976-980
◽
Jae Beom Park
◽
Woong Sun Lim
◽
Sang Duk Park
◽
Byoung Jae Park
◽
Geun Young Yeom