Application of Spectroscopic Ellipsometry for the Study of Electrical and Optical Properties of Indium Tin Oxide Thin Films

Acta Optica Sinica ◽

10.3788/aos201434.1031003 ◽

2014 ◽

Vol 34 (10) ◽

pp. 1031003

Author(s):

胡慧 Hu Hui ◽

张丽平 Zhang Liping ◽

孟凡英 Meng Fanying ◽

刘正新 Liu Zhengxin

Keyword(s):

Optical Properties ◽

Tin Oxide ◽

Spectroscopic Ellipsometry ◽

Indium Tin Oxide ◽

Oxide Thin Films ◽

Electrical And Optical Properties

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Structural, electrical and optical properties of indium tin oxide thin films prepared by RF sputtering using different density ceramic targets

Vacuum ◽

10.1016/j.vacuum.2011.11.008 ◽

2012 ◽

Vol 86 (8) ◽

pp. 1045-1047 ◽

Author(s):

Wei Zhang ◽

Guisheng Zhu ◽

Li Zhi ◽

Huijuan Yang ◽

Zupei Yang ◽

...

Keyword(s):

Optical Properties ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Rf Sputtering ◽

Oxide Thin Films ◽

Electrical And Optical Properties ◽

Ceramic Targets

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Electrical and optical properties of indium tin oxide thin films deposited on unheated substrates by d.c. reactive sputtering

Thin Solid Films ◽

10.1016/0040-6090(93)90737-a ◽

1993 ◽

Vol 223 (1) ◽

pp. 135-139 ◽

Author(s):

T. Karasawa ◽

Y. Miyata

Keyword(s):

Optical Properties ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Reactive Sputtering ◽

Oxide Thin Films ◽

Electrical And Optical Properties

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Parametrization of optical properties of indium–tin–oxide thin films by spectroscopic ellipsometry: Substrate interfacial reactivity

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1421596 ◽

2002 ◽

Vol 20 (1) ◽

pp. 37-42 ◽

Author(s):

M. Losurdo ◽

M. Giangregorio ◽

P. Capezzuto ◽

G. Bruno ◽

R. De Rosa ◽

...

Keyword(s):

Optical Properties ◽

Tin Oxide ◽

Spectroscopic Ellipsometry ◽

Indium Tin Oxide ◽

Oxide Thin Films ◽

Interfacial Reactivity

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Effect of Target Density on Microstructural, Electrical, and Optical Properties of Indium Tin Oxide Thin Films

Journal of Electronic Materials ◽

10.1007/s11664-012-2155-x ◽

2012 ◽

Vol 41 (9) ◽

pp. 2376-2379 ◽

Author(s):

Guisheng Zhu ◽

Li Zhi ◽

Huijuan Yang ◽

Huarui Xu ◽

Aibing Yu

Keyword(s):

Optical Properties ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Thin Films ◽

Electrical And Optical Properties ◽

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Control and Characterization of the Structural, Electrical, and Optical Properties of Amorphous Zinc−Indium−Tin Oxide Thin Films

ACS Applied Materials & Interfaces ◽

10.1021/am900321f ◽

2009 ◽

Vol 1 (10) ◽

pp. 2147-2153 ◽

Author(s):

D. Bruce Buchholz ◽

Jun Liu ◽

Tobin J. Marks ◽

Ming Zhang ◽

Robert P. H. Chang

Keyword(s):

Optical Properties ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Thin Films ◽

Electrical And Optical Properties ◽

Zinc Indium Tin Oxide

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Influence of thermal annealing on electrical and optical properties of indium tin oxide thin films

Materials Science in Semiconductor Processing ◽

10.1016/j.mssp.2014.05.026 ◽

2014 ◽

Vol 26 ◽

pp. 588-592 ◽

Author(s):

Zhou Xu ◽

Peng Chen ◽

Zhenlong Wu ◽

Feng Xu ◽

Guofeng Yang ◽

...

Keyword(s):

Optical Properties ◽

Thermal Annealing ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Thin Films ◽

Electrical And Optical Properties

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Electrical and optical properties of indium tin oxide thin films grown by pulsed laser deposition

Applied Physics A ◽

10.1007/s003390051435 ◽

1999 ◽

Vol 69 (7) ◽

pp. S447-S450 ◽

Author(s):

H. Kim ◽

J.S. Horwitz ◽

A. Piqué ◽

C.M. Gilmore ◽

D.B. Chrisey

Keyword(s):

Optical Properties ◽

Pulsed Laser Deposition ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Pulsed Laser ◽

Laser Deposition ◽

Oxide Thin Films ◽

Electrical And Optical Properties

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Structural, electrical and optical properties of indium–tin–oxide thin films prepared by pulsed laser deposition

Thin Solid Films ◽

10.1016/j.tsf.2007.04.017 ◽

2007 ◽

Vol 515 (20-21) ◽

pp. 7829-7833 ◽

Author(s):

A. Khodorov ◽

M. Piechowiak ◽

M.J.M. Gomes

Keyword(s):

Optical Properties ◽

Pulsed Laser Deposition ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Pulsed Laser ◽

Laser Deposition ◽

Oxide Thin Films ◽

Electrical And Optical Properties

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Structural, electrical and optical properties of radio frequency sputtered indium tin oxide thin films modified by annealing in silicon oil and vacuum

Thin Solid Films ◽

10.1016/j.tsf.2014.02.023 ◽

2014 ◽

Vol 556 ◽

pp. 253-259 ◽

Author(s):

Ram Narayan Chauhan ◽

R.S. Anand ◽

Jitendra Kumar

Keyword(s):

Optical Properties ◽

Radio Frequency ◽

Tin Oxide ◽

Indium Tin Oxide ◽

Oxide Thin Films ◽

Electrical And Optical Properties ◽

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Effect of Fe and N co-doping on structural, electrical and optical properties of tin oxide thin films

Materials Letters ◽

10.1016/j.matlet.2018.10.070 ◽

2019 ◽

Vol 236 ◽

pp. 366-369 ◽

Author(s):

Fakai Xue ◽

Keyi Li ◽

Jiwen Liu

Keyword(s):

Optical Properties ◽

Tin Oxide ◽

Oxide Thin Films ◽

Electrical And Optical Properties ◽

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