scholarly journals The Formation of C3O3H6 Structural Isomers in the Gas Phase through Barrierless Pathways: Formation and Spectroscopic Characterization of Methoxy Acetic Acid

2021 ◽  
Vol 913 (1) ◽  
pp. 21
Author(s):  
Victoria Gámez ◽  
María Luisa Senent
2011 ◽  
Vol 270 (2) ◽  
pp. 98-107 ◽  
Author(s):  
Joshua A. Sebree ◽  
David F. Plusquellic ◽  
Timothy S. Zwier

1984 ◽  
Vol 38 ◽  
Author(s):  
Joda C. Wormhoudt ◽  
Alan C. Stanton ◽  
Joel A. Silver

AbstractTwo processes of great importance in the semiconductor industry are vapor deposition and plasma etching. This paper presents a review of laser techniques for spectroscopic characterization of the gas phase species involved in these processes. Band strength and other spectroscopic data for selected molecules are used to give estimates of the detection sensitivity in vibrational and electronic bands. Preliminary results are given from work presently in progress in our laboratory on the detection of such species. The discussion includes examples of the application of these techniques to a number of laboratory deposition and etching devices.


2017 ◽  
Vol 121 (6) ◽  
pp. 1233-1239 ◽  
Author(s):  
Dilrukshi Hewage ◽  
Wenjin Cao ◽  
Jong Hyun Kim ◽  
Ya Wang ◽  
Yang Liu ◽  
...  

2008 ◽  
Vol 112 (39) ◽  
pp. 9454-9466 ◽  
Author(s):  
Ching-Ping Liu ◽  
Josh J. Newby ◽  
Christian W. Müller ◽  
Hsiupu D. Lee ◽  
Timothy S. Zwier

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