Fabrication and Electrical Characterization of Epitaxially Grown (Ba,Sr)TiO3 Thin Films Prepared by Sol-Gel Method

Author(s):  
Tadasu Hosokura ◽  
Akira Ando ◽  
Yukio Sakabe
2006 ◽  
Vol 320 ◽  
pp. 81-84 ◽  
Author(s):  
Tadasu Hosokura ◽  
Akira Ando ◽  
Yukio Sakabe

Epitaxially grown (Ba,Sr)TiO3 thin films were prepared on platinum-coated silicon substrate by sol-gel method using a (Ba,Sr)TiO3 sol derived from Ba(CH3COO)2, Sr(CH3COO)2 and Ti(O-i-C3H7)4. The morphology of the films was found to depend on the annealing condition. A columnar structure was obtained for (Ba,Sr)TiO3 thin film by annealing at 800 °C and a columnar grain was found to be single crystal by transmission electron microscope (TEM). The columnar grown film exhibits a preferred (111) orientation that follows the (111) orientation of Pt substrate. Measurement of the C-V in MFM was configured in order to demonstrate good dielectric properties. Obtained films showed high voltage tunability.


2007 ◽  
Vol 515 (13) ◽  
pp. 5381-5385 ◽  
Author(s):  
J. Santos‐Cruz ◽  
G. Torres‐Delgado ◽  
R. Castanedo‐Perez ◽  
C.I. Zúñiga‐Romero ◽  
O. Zelaya‐Angel

2018 ◽  
Vol 766 ◽  
pp. 601-608 ◽  
Author(s):  
Hao Shen ◽  
Yinong Yin ◽  
Kun Tian ◽  
Karthikeyan Baskaran ◽  
Libing Duan ◽  
...  

2011 ◽  
Vol 13 (6) ◽  
pp. 1232-1234 ◽  
Author(s):  
Vaishali Patil ◽  
Arun Patil ◽  
Ji-Won Choi ◽  
Seok-Jin Yoon

2012 ◽  
Vol 121 (1) ◽  
pp. 217-220 ◽  
Author(s):  
M.S. Kim ◽  
K.G. Yim ◽  
S. Kim ◽  
G. Nam ◽  
D.Y. Lee ◽  
...  

2004 ◽  
Vol 1 (S1) ◽  
pp. S116-S120 ◽  
Author(s):  
E. Sánchez-Mora ◽  
E. Gómez-Barojas ◽  
J.M. Gracia-Jiménez ◽  
R. Silva-González ◽  
F. Pérez-Rodríguez

2011 ◽  
Vol 40 (37) ◽  
pp. 9544 ◽  
Author(s):  
Xuebin Zhu ◽  
Xianwu Tang ◽  
Dongqi Shi ◽  
Hongbin Jian ◽  
Hechang Lei ◽  
...  

Optik ◽  
2001 ◽  
Vol 112 (7) ◽  
pp. 316-320 ◽  
Author(s):  
R. Palomino-Merino ◽  
A. Mendoza-Galván ◽  
G. Martínez ◽  
V. Castaño ◽  
R. Rodríguez

Sign in / Sign up

Export Citation Format

Share Document