Preparation and Hydrophobic Processing of Aluminum-Doped Zinc Oxide Films
2010 ◽
Vol 39
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pp. 44-49
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Keyword(s):
In this research, transparent and conductive aluminum-doped zinc oxide (AZO) films were prepared on glass substrates by metal-organic chemical vapor deposition (MOCVD). A nanostructured hydrophobic layer of fluorocarbon (FC) compounds was formed on the films by low-temperature dielectric barrier discharge plasma enhanced chemical vapor deposition (DBD-PECVD), as hydrophobic processing. Scanning electron microscopy (SEM) and contact angle analyzer were used to characterize and analyze the surface morphology, structure and hydrophobicity of these samples. The results indicate that the hydrophobicity of transparent conductive AZO films was enhanced by the deposition of the FC film.
2008 ◽
Vol 47
(4)
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pp. 2994-2998
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1981 ◽
Vol 128
(12)
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pp. 2684-2686
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2009 ◽
Vol 48
(4)
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pp. 04C135
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2010 ◽
Vol 2010
(9)
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pp. 1366-1372
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2006 ◽
Vol 296
(1)
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pp. 43-50
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2008 ◽
Vol 20
(S1)
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pp. 441-445
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