Design and Simulation of Thermopile Sensor Technology Based on Porous Silicon

2015 ◽  
Vol 741 ◽  
pp. 289-293
Author(s):  
Yan Wei Dou ◽  
Cheng Jun Qiu ◽  
Bo Zang ◽  
Jing Xuan Wang ◽  
Xiao Dong Zhang
Keyword(s):  
Mechanical Property ◽  
Porous Silicon ◽  
Polycrystalline Silicon ◽  
Sensor Technology ◽  
Thermal Isolation ◽  
Thermoelectromotive Force ◽  
Software Analysis ◽  
Ansys Simulation ◽  
Isolation Layer ◽  
Thermopile Sensor

Thermopile sensor using porous silicon (PS) as thermal isolation layer was designed. Thermal stability and mechanical property of sensor were simulated by IntelliSuite CAD software. Analysis results showed stress and temperature distribution of PS layer. Ansys simulation indicated that thermocouple’s thermoelectromotive force was decided by its material composition. If thermocouple was composed of polycrystalline silicon/aluminum, its thermoelectromotive force would reach 256.8 μV/K.

scholarly journals Study on thermal conductivity of porous silicon thermal isolation layer based on micro-structure mathematical model

2010 ◽  
Vol 59 (12) ◽  
pp. 8794
Author(s):  
Xu Lu-Jia ◽  
Hu Ming ◽  
Yang Hai-Bo ◽  
Yang Meng-Lin ◽  
Zhang Jie
Keyword(s):  
Thermal Conductivity ◽  
Mathematical Model ◽  
Porous Silicon ◽  
Micro Structure ◽  
Thermal Isolation ◽  
Isolation Layer

Composition and Structure of Spark Eroded Porous Silicon

1992 ◽  
Vol 283 ◽  
Author(s):  
R. E. Hummel ◽  
S.-S. Chang ◽  
M. Ludwig ◽  
A. Morrone
Keyword(s):  
Porous Silicon ◽  
Polycrystalline Silicon ◽  
Amorphous Matrix ◽  
Vibrational Modes ◽  
Photoluminescence Spectra ◽  
X Ray ◽  
Composition And Structure ◽  
Bending Mode ◽  
Spark Erosion ◽  
Silicon Particles

ABSTRACTPorous silicon which has been prepared by a “dry” technique, that is, by spark erosion, yields similar photoluminescence spectra as anodically etched porous silicon which has been prepared in aqueous solutions. Fourier transform infrared spectra reveal that the dominant features in spark eroded silicon are the Si-O-Si stretching mode and the Si-O-Si bending mode. No infrared vibrational modes characteristic for siloxene have been found in spark eroded Si. Results from X-ray and electron diffraction studies suggest that spark eroded Si involves minute polycrystalline silicon particles which are imbedded in an amorphous matrix.

Characterization of a silicon thermal gas-flow sensor with porous silicon thermal isolation

2002 ◽  
Vol 2 (5) ◽  
pp. 463-475 ◽  
Author(s):  
G. Kaltsas ◽  
A.A. Nassiopoulos ◽  
A.G. Nassiopoulou
Keyword(s):  
Porous Silicon ◽  
Gas Flow ◽  
Flow Sensor ◽  
Thermal Isolation

Fabrication of a Microbiochemical Reactor with Thick Thermal Isolation Layer and Integrated Pt Heater/Sensor in the Microwell

2004 ◽  
Vol 43 (6B) ◽  
pp. 3868-3871 ◽  
Author(s):  
Hoon-Sung Choi ◽  
Chang-Taeg Seo ◽  
Duk-Soo Eun ◽  
Jang-Kyoo Shin ◽  
Pyung Choi ◽  
...  
Keyword(s):  
Thermal Isolation ◽  
Isolation Layer

Effect of grain boundaries on the formation of luminescent porous silicon from polycrystalline silicon films

1994 ◽  
Vol 65 (14) ◽  
pp. 1787-1789 ◽  
Author(s):  
P. Guyader ◽  
P. Joubert ◽  
M. Guendouz ◽  
C. Beau ◽  
M. Sarret
Keyword(s):  
Porous Silicon ◽  
Grain Boundaries ◽  
Polycrystalline Silicon ◽  
Silicon Films ◽  
Polycrystalline Silicon Films

A Silicon Thermal Accelerometer Without Solid Proof Mass Using Porous Silicon Thermal Isolation

2007 ◽  
Vol 7 (7) ◽  
pp. 983-989 ◽  
Author(s):  
Dimitris Goustouridis ◽  
Grigoris Kaltsas ◽  
Androula G. Nassiopoulou
Keyword(s):  
Porous Silicon ◽  
Proof Mass ◽  
Thermal Isolation
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