Modeling of Physical and Chemical Processes of Anodic Bonding Technology
2014 ◽
Vol 1040
◽
pp. 513-518
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Keyword(s):
A Charge
◽
Modeling ideas of physical and chemical processes when using an anodic bonding for materials connection are developed. The kinetics of a charge accumulation in an electrode region in a dielectric is considered. The thickness of a charge layer, electric fields strength and value of the ponderomotive pressure providing connection of materials are calculated. It is shown that the necessary ponderomotive pressure resulting in a dielectric-to-conductor seal is normally about ten MPa and the time required is about ten minutes.
1984 ◽
Vol 52
(01)
◽
pp. 015-018
◽
Keyword(s):
2007 ◽
Vol 6
(2)
◽
pp. 213-228
2020 ◽
2017 ◽
Vol 9
(6)
◽
pp. 06022-1-06022-6
2020 ◽
Vol 491
(1)
◽
pp. 85-88
◽
1989 ◽
Vol 54
(1)
◽
pp. 117-135
2018 ◽