Receiving and Research of Diamond-Like PVD-Coating

2015 ◽  
Vol 1088 ◽  
pp. 391-394
Author(s):  
Dmitry M. Kononov ◽  
Alexei V. Zhdanov ◽  
Valentin V. Morozov
Keyword(s):  
Magnetron Sputtering ◽  
Tribological Properties ◽  
Experimental Studies ◽  
Pvd Coatings ◽  
Mechanical And Tribological Properties ◽  
Pvd Coating

The article deals with producing diamondlike-PVD-coatings based on carbon: a-C and a-C:H and MeN/CNx. These types of coatings were prepared by magnetron sputtering materials in vacuum. The results of experimental studies of their mechanical and tribological properties and recommendations for use in industry

scholarly journals Structure, Oxidation Resistance, Mechanical, and Tribological Properties of N- and C-Doped Ta-Zr-Si-B Hard Protective Coatings Obtained by Reactive D.C. Magnetron Sputtering of TaZrSiB Ceramic Cathode

Coatings ◽  
2020 ◽  
Vol 10 (10) ◽  
pp. 946
Author(s):  
Ph. V. Kiryukhantsev-Korneev ◽  
A. D. Sytchenko ◽  
S. A. Vorotilo ◽  
V. V. Klechkovskaya ◽  
V. Yu. Lopatin ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Oxidation Resistance ◽  
Tribological Properties ◽  
Protective Coatings ◽  
Elastic Recovery ◽  
Protective Film ◽  
X Ray Diffraction ◽  
Energy Dispersion Spectroscopy ◽  
X Ray ◽  
Mechanical And Tribological Properties

Coatings in the Ta-Zr-Si-B-C-N system were produced by magnetron sputtering of a TaSi2-Ta3B4-(Ta,Zr)B2 ceramic target in the Ar medium and Ar-N2 and Ar-C2H4 gas mixtures. The structure and composition of coatings were studied using scanning electron microscopy, glow discharge optical emission spectroscopy, energy-dispersion spectroscopy, and X-ray diffraction. Mechanical and tribological properties of coatings were determined using nanoindentation and pin-on-disk tests using 100Cr6 and Al2O3 balls. The oxidation resistance of coatings was evaluated by microscopy and X-ray diffraction after annealing in air at temperatures up to 1200 °C. The reactively-deposited coatings containing from 30% to 40% nitrogen or carbon have the highest hardness up to 29 GPa and elastic recovery up to 78%. Additionally, coatings with a high carbon content demonstrated a low coefficient of friction of 0.2 and no visible signs of wear when tested against 100Cr6 ball. All coatings except for the non-reactive ones can resist oxidation up to a temperature of 1200 °C thanks to the formation of a protective film based on Ta2O5 and SiO2 on their surface. Coatings deposited in Ar-N2 and Ar-C2H4 demonstrated superior resistance to thermal cycling in conditions 20-T−20 °C (where T = 200–1000 °C). The present article compares the structure and properties of reactive and “standard-inert atmosphere” deposited coatings to develop recommendations for optimizing the composition.

Mechanical and tribological properties of CNx films deposited by reactive magnetron sputtering

Wear ◽  
2001 ◽  
Vol 248 (1-2) ◽  
pp. 55-64 ◽  
Author(s):  
E. Broitman ◽  
N. Hellgren ◽  
O. Wänstrand ◽  
M.P. Johansson ◽  
T. Berlind ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Tribological Properties ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Mechanical And Tribological Properties ◽  
Cnx Films
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