Analysis of Electro-Statically Driven Micro-Electro-Mechanical Systems
2006 ◽
Vol 306-308
◽
pp. 1247-1252
Keyword(s):
In this paper, a methodology of modeling and simulating the electro-statically driven micro-electromechanical systems (MEMS) is presented, utilizing topography data with an arbitrary structure. In the methodology, the mask layout and process recipe of a device are first generated and the model then discretized by an auto-mesh generation for the finite element analysis. Finally the analysis is performed to solve the Laplace and the dynamic equation at a time. The methodology is applied to an electro-statically driven comb-drive as a test vehicle for verification.
2006 ◽
Vol 326-328
◽
pp. 851-854
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2014 ◽
Vol 525
◽
pp. 731-735
◽
Keyword(s):
2013 ◽
Vol 83
(7)
◽
pp. 1087-1096
◽
Keyword(s):
2012 ◽
Vol 24
(3)
◽
pp. 326-333
◽