A Scanning White-Light Interferometric Profilometer for Smooth and Rough Surface

2007 ◽  
Vol 364-366 ◽  
pp. 364-370 ◽  
Author(s):  
Rong Dai ◽  
Tie Bang Xie ◽  
Su Ping Chang
Keyword(s):  
Rough Surface ◽  
White Light ◽  
Surface Profile ◽  
Ccd Camera ◽  
Measuring System ◽  
Profile Measurement ◽  
Integrated Optical ◽  
Optical Grating ◽  
Measured Profile ◽  
Surface Dimension

A profilometer for micro-surface topography measurement is presented. The instrument is based on the scanning white-light microscopic interferometry (SWLMI). A Linnik type interference microscope is used and the interferograms which present changes of surface profile are recorded by a CCD camera. A developed nano-positioning work stage with integrated optical grating displacement measuring system realizes the precise vertical scanning motion during profile measurement. By white-light phase shifting algorism of arbitrary steps, frames of interferograms are processed by computer to rebuild and evaluate the measured profile. Because of the specialty of SWLMI, the profilometer is suitable for both smooth and rough surface measuring. It also can be used for the measurement of curved surface, dimension of MEMS etc. The vertical resolution of the profilometer is 0.5nm, lateral resolution 0.5+m.

scholarly journals Phase Error Caused by Speed Mismatch Analysis in the Line-Scan Defect Detection by Using Fourier Transform Technique

2015 ◽  
Vol 2015 ◽  
pp. 1-10
Author(s):  
Eryi Hu ◽  
Yuan Hu
Keyword(s):  
Fourier Transform ◽  
Fringe Pattern ◽  
Phase Error ◽  
Engineering Application ◽  
Surface Profile ◽  
Experimental System ◽  
Ccd Camera ◽  
Profile Measurement ◽  
Line Scan ◽  
Moving Speed

The phase error caused by the speed mismatch issue is researched in the line-scan images capturing 3D profile measurement. The experimental system is constructed by a line-scan CCD camera, an object moving device, a digital fringe pattern projector, and a personal computer. In the experiment procedure, the detected object is moving relative to the image capturing system by using a motorized translation stage in a stable velocity. The digital fringe pattern is projected onto the detected object, and then the deformed patterns are captured and recorded in the computer. The object surface profile can be calculated by the Fourier transform profilometry. However, the moving speed mismatch error will still exist in most of the engineering application occasion even after an image system calibration. When the moving speed of the detected object is faster than the expected value, the captured image will be compressed in the moving direction of the detected object. In order to overcome this kind of measurement error, an image recovering algorithm is proposed to reconstruct the original compressed image. Thus, the phase values can be extracted much more accurately by the reconstructed images. And then, the phase error distribution caused by the speed mismatch is analyzed by the simulation and experimental methods.

On-Machine Optical Surface Profile Measuring System for Nano-Machining

2011 ◽  
Vol 5 (3) ◽  
pp. 369-376 ◽  
Author(s):  
Hiroshi Sawano ◽  
◽  
Motohiro Takahashi ◽  
Hayato Yoshioka ◽  
Hidenori Shinno ◽  
...  
Keyword(s):  
Error Detection ◽  
Machine Surface ◽  
Detection Method ◽  
Surface Profile ◽  
Optical Probe ◽  
Measuring System ◽  
Profile Measurement ◽  
Optical Surface ◽  
Increasing Demand ◽  
Surface Profile Measurement

There has been an increasing demand for machining of precision parts recently. In order to meet such requirements, nano-machining systems with on-machine surface profile measuring function are required. This paper presents a newly developed on-machine shape measuring system with an optical probe. In this system, an astigmatic focus error detection method is applied to the optical probe. In addition, the influence of the uneven reflection from the surface can be reduced by using two quadrant photodiodes. The results of surface profile measurement confirm that the system developed provides a resolution of 1 nm scale and a repeatability of approximately 50 nm.

Surface profile measurement in white-light scanning interferometry using a three-chip color CCD

2011 ◽  
Vol 50 (15) ◽  
pp. 2246 ◽  
Author(s):  
Suodong Ma ◽  
Chenggen Quan ◽  
Rihong Zhu ◽  
Cho Jui Tay ◽  
Lei Chen
Keyword(s):  
White Light ◽  
Surface Profile ◽  
Chip Color ◽  
Profile Measurement ◽  
Surface Profile Measurement

Development of a Print-Through Phenomenon Measurement System Using the Fringe Reflection Method for the Fiber Reinforced Plastics

2010 ◽  
Vol 437 ◽  
pp. 131-135
Author(s):  
Fang Jung Shiou ◽  
Hsin Ju Chen ◽  
Chia Hao Hsu
Keyword(s):  
Surface Roughness ◽  
Measurement System ◽  
Surface Profile ◽  
Ccd Camera ◽  
Profile Measurement ◽  
Fiber Reinforced ◽  
Reflection Method ◽  
Reinforced Plastics ◽  
Measuring Machine ◽  
Fiber Reinforced Plastics

Precision noncontact measurement of the print-through phenomenon (PTP) of the fiber-reinforced plastics (FRP) is an urgent problem to be solved in yacht industry, especially for the quantization of the surface roughness and the profile of the yacht surface with PTP. The study presents the development of a surface profile measurement system using a fringe reflection method on a PC-based 3-axis measuring machine. The developed system mainly consists of a PC-based 3-axis machine, a CCD Camera, a programmable liquid crystal display (LCD) as a fringe projector, a screen on which the reflected fringe would be projected, a set of measurement software, and a PC. The surface roughness and the 2D profile of the flat composite specimens with PTP could be measured simultaneously using the fringe reflection method, based on the calibration results. Two-dimensional profile of a specimen with PTP was determined by the triangulation principle. The surface roughness of a test object was determined based on the scattering principle.

Development of Phase-retrieval measuring System for 3D Micromachined Surface Profile Measurement

2002 ◽  
Vol 2002.5 (0) ◽  
pp. 289-290
Author(s):  
Yasuhiro TAKAYA ◽  
Atsushi TAGUCHI ◽  
Satoru TAKAHASHI ◽  
Takashi MIYOSHI
Keyword(s):  
Phase Retrieval ◽  
Surface Profile ◽  
Measuring System ◽  
Profile Measurement ◽  
Surface Profile Measurement

Signal correction by detection of scanning position in a white-light interferometer for exact surface profile measurement

2019 ◽  
Vol 58 (13) ◽  
pp. 3548 ◽  
Author(s):  
Songjie Luo ◽  
Takamasa Suzuki ◽  
Osami Sasaki ◽  
Samuel Choi ◽  
Ziyang Chen ◽  
...  
Keyword(s):  
White Light ◽  
Surface Profile ◽  
Profile Measurement ◽  
White Light Interferometer ◽  
Signal Correction ◽  
Surface Profile Measurement
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