Characteristics of the Wheel Surface Topography in Ultra-precision Grinding of Silicon Wafers

2008 ◽  
Vol 389-390 ◽  
pp. 36-41
Author(s):  
Feng Wei Huo ◽  
Dong Ming Guo ◽  
Ren Ke Kang ◽  
Zhu Ji Jin
Keyword(s):  
Surface Topography ◽  
Sampling Interval ◽  
Grinding Wheel ◽  
Height Distribution ◽  
Wheel Surface ◽  
Diamond Grinding Wheel ◽  
Diamond Grinding ◽  
Cutting Surface ◽  
Ultra Precision ◽  
Cutting Direction

A 3D profiler based on scanning white light interferometry with a lateral sampling interval of 0.11μm was introduced to measure the surface topography of a #3000 diamond grinding wheel, and a large sampling area could be achieved by its stitching capability without compromising its lateral or vertical resolution. The protrusion height distribution of diamond grains and the static effective grain density of the grinding wheel were derived, and the wheel chatter and the deformation of the wheel were analyzed as well. The study shows that the grain protrusion height obeys an approximate normal distribution, the static effective grain density is much lower than the theoretical density, and only a small number of diamond grains are effective in the grinding process with fine diamond grinding wheel. There exists waviness on the grinding wheel surface parallel with the wheel cutting direction. The cutting surface of the grinding wheel is not flat but umbilicate, which indicates that the elastic deformation at the wheel edges is much larger than in the center region.

Measurement system of surface topography for diamond grinding wheel

2014 ◽  
Vol 22 (12) ◽  
pp. 3167-3174 ◽  
Author(s):  
崔长彩 CUI Chang-cai ◽  
余卿 YU Qing ◽  
张遨 ZHANG Ao ◽  
李瑞旭 LI Rui-xu ◽  
黄辉 HUANG Hui ◽  
...  
Keyword(s):  
Surface Topography ◽  
Measurement System ◽  
Grinding Wheel ◽  
Diamond Grinding Wheel ◽  
Diamond Grinding

A Study on Surface Generation of Metal-Bonded Diamond Grinding Wheel Dressed by Electro-Contact Discharge

2006 ◽  
Vol 304-305 ◽  
pp. 76-80 ◽  
Author(s):  
Jin Xie ◽  
Yong Tang ◽  
Junichi Tamaki
Keyword(s):  
Ground Surface ◽  
Open Circuit ◽  
Surface Generation ◽  
Grinding Wheel ◽  
Wheel Surface ◽  
Diamond Grinding Wheel ◽  
Diamond Grinding ◽  
Eds Analysis ◽  
Fine Diamond ◽  
Contact Discharge

This paper conducted Electro-Contact Discharge (ECD) dressing experiment for #600 diamond grinding wheel to understand how fine diamond grits protrude from metal-bonded wheel surface. The SEM observation, EDS analysis, image processing and 3D grit modeling on wheel surface were carried out to investigate grit protrusion characteristics. Then ECD dressing and mechanical dressing experiments were carried out to identify the effect of grit protrusion feature on grinding performance. It is confirmed that the dressed wheel surface topography is sensitive to open circuit voltage Ei, discharge polarity and electrode composition. Meanwhile, ECD dressing with Ei=15V and straight polarity can produce superior protrusion topography without the damage of diamond crystal faces and the bond tail behind protrusive grit. It can obtain better ground surface of hard-brittle material than mechanical dressing with the bond tail.

A Study on Fractal Dimension of Grit Protrusion Topography of Diamond Grinding Wheel

2008 ◽  
Vol 375-376 ◽  
pp. 583-587
Author(s):  
Jin Xie ◽  
Yu Guan Zhong
Keyword(s):  
Image Processing ◽  
Fractal Dimension ◽  
Depth Of Cut ◽  
Grinding Wheel ◽  
Wheel Surface ◽  
Diamond Grit ◽  
Diamond Grinding Wheel ◽  
Diamond Grinding

Fractal dimension is proposed to evaluate grit protrusion feature concerning grit protrusion area and length. The aim is to investigate crystal integrate of diamond grit protruded from grinding wheel after dressing. First, 3D crystal diamond grits are established in AutoCAD concerning various crystal configurations. Second, fractal dimension for original diamond grit is analyzed theoretically. Then, dressing experiment is carried out to investigate fractal dimension of grit protrusion topography by suing image processing of SEM photos of dressed grinding wheel surface. Finally, grit protrusion feature is investigated by fractal dimension concerning the depth of cut in dressing process. It is confirmed that fractal dimension can display grit protrusion feature and it may be used to evaluate dressing performance.

Surface Layer Damage of Quartz Glass Induced by Ultra-Precision Grinding with Different Grit Size

2017 ◽  
Vol 872 ◽  
pp. 19-24
Author(s):  
Zong Chao Geng ◽  
Shang Gao ◽  
Ren Ke Kang ◽  
Zhi Gang Dong
Keyword(s):  
Surface Roughness ◽  
Quartz Glass ◽  
Subsurface Damage ◽  
Grinding Wheel ◽  
Precision Grinding ◽  
Diamond Grinding Wheel ◽  
Diamond Grinding ◽  
Roughness Surface ◽  
Ultra Precision ◽  
Damage Depth

Quartz glass is a typical hard and brittle material. During the manufacturing process of quartz glass components, ultra-precision grinding is widely used due to its high throughput and good dimensional accuracies. However, grinding will unavoidably induce large surface and subsurface damage. In this study, the surface and subsurface damage characteristics of quartz glass substrates ground by diamond wheels with different grit sizes were investigated in terms of surface roughness, surface topography, subsurface microcrack characteristic, and subsurface damage depth. Discussion was also provided to explore corresponding reasons of surface and subsurface damage induced by diamond grinding wheels with different grit sizes of #1500 and #2000. The experiment results showed that the surface roughness, surface damage, and subsurface damage depth induced by #2000 quartz glass was ground by #1500 diamond grinding wheel, and in ductile mode when ground by #2000 diamond grinding wheel.

Multi-Pulsed Laser Truing and Dressing of Deterioration Layer on Bronze-Bonded Diamond Grinding Wheel Surface

2017 ◽  
Vol 44 (12) ◽  
pp. 1202001
Author(s):  
蔡颂 Cai Song ◽  
陈根余 Chen Genyu ◽  
周聪 Zhou Cong ◽  
明兴祖 Ming Xingzu
Keyword(s):  
Pulsed Laser ◽  
Grinding Wheel ◽  
Wheel Surface ◽  
Diamond Grinding Wheel ◽  
Diamond Grinding

ELID Assisted Precision Conditioning of Coarse-Grained Diamond Grinding Wheel

2007 ◽  
Vol 364-366 ◽  
pp. 578-583 ◽  
Author(s):  
Qing Liang Zhao ◽  
Ekkard Brinksmeier ◽  
Otmann Riemer ◽  
Kai Rickens
Keyword(s):  
Optical Glass ◽  
Diamond Wheel ◽  
Force Transducer ◽  
Coarse Grained ◽  
Experimental Result ◽  
Grinding Wheel ◽  
Wheel Surface ◽  
Diamond Grinding Wheel ◽  
Diamond Grinding ◽  
Ductile Machining

In order to realize ductile machining of optical glasses using mono-layer nickel electroplated coarse-grained diamond grinding wheel, a novel conditioning technique features using a copper bonded diamond grinding wheels of 15m grain size dressed by ELID (electrolytic inprocess dressing) to condition the 46m grain sized diamond wheel has been developed. During the conditioning process, a force transducer was used to monitor the conditioning force, a coaxial optical distance measurement system was used to in-situ monitor the modified wheel surface status. White-light interferometry (WLI), scanning electron microscopy (SEM) and atomic force microscopy (AFM) were used to characterize the conditioned wheel surface status as well as the ground optical glass surface topography correspondingly. The experimental result indicates that a minimized wheel radial run-out error of less than 2μm as well as the top-flattened diamond grains of constant wheel peripheral envelop profile were generated on a 5-axis ultra-precision machine tool. The grinding experiment proved that the well conditioned 46μm coarse-grained diamond wheel can be used in realizing the ductile grinding of optical glass BK7, which indicates that the newly developed conditioning technique is feasible and applicable to introduce the coarse-grained diamond wheels into precision machining of brittle and hard-to-machine materials.

scholarly journals Simulation of Diamond Grinding Wheel to Characterize the Surface Topography.

1999 ◽  
Vol 65 (4) ◽  
pp. 581-585
Author(s):  
Katsumi MIZUTANI ◽  
Tsuneo KAWANO ◽  
Kazutoshi ADACHI ◽  
Nobuo KUMAGAI
Keyword(s):  
Surface Topography ◽  
Grinding Wheel ◽  
Diamond Grinding Wheel ◽  
Diamond Grinding

Stitching for a large area of surface topography analysis of diamond grinding wheel

2013 ◽  
Author(s):  
Shuang Wang ◽  
Changcai Cui ◽  
Chunqi Huang ◽  
Hui Huang ◽  
Ruifang Ye ◽  
...  
Keyword(s):  
Surface Topography ◽  
Grinding Wheel ◽  
Large Area ◽  
Diamond Grinding Wheel ◽  
Diamond Grinding ◽  
Topography Analysis
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