Hole-Like Defects in n-Channel 4H-SiC MESFETs Observed by Current Transient Spectroscopy
2005 ◽
Vol 483-485
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pp. 865-868
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Conductance DLTS measurements have been performed on 4H-SiC MESFETs. A broad band due to electron emission by different levels is observed. An additional “hole-like” level with activation energy of 0.9 eV is obtained in linear regime but not in saturation regime. From the results, it is proposed that this “hole-like” signal is due to capture of electron present at a conductive SiC/SiO2 interfacial layer.
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2014 ◽
Vol 44
(1)
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pp. 222-226
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Keyword(s):
1991 ◽
Vol 6
(9)
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pp. 937-939
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2011 ◽
Vol 50
(5)
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pp. 05FC08
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