An Investigation of Form Compensation in Fabricating Microlens Arrays by Ultra-Precision Fast-Tool-Servo Technology

2006 ◽  
Vol 532-533 ◽  
pp. 689-692 ◽  
Author(s):  
Tsz Chun Kwok ◽  
Suet To ◽  
Chi Fai Cheung ◽  
Su Juan Wang ◽  
Wing Bun Lee
Keyword(s):  
Measurement Data ◽  
Precision Machining ◽  
High Tech ◽  
Fast Tool Servo ◽  
Form Error ◽  
Microlens Arrays ◽  
Ultra Precision ◽  
Radius Compensation ◽  
Critical Components ◽  
Tool Compensation

Microlens arrays are widely used as critical components in a large number of photonics and telecommunication products. The increasing demand for high-tech products provides an expanding room for the development of the micro-fabrication technology. This study presents a tool compensation for correcting the form error of fabricated microlenses in ultra-precision machining with fast-tool-servo (FTS) system. After presentation of optimal cutting conditions deduced on the basis of cutting experiments of microlens arrays, a tool radius compensation method will be proposed and evaluated in this paper. This methodology makes use of form measurement data from a Form Talysurf system to modify the C program employed in the software of ultra-precision machining FTS system – SOP. The form error was successfully reduced after implementation of tool compensation.

Study on Ultra-Precision Ball Surface Floating Polishing Kinematics Mechanism

2006 ◽  
Vol 532-533 ◽  
pp. 109-112
Author(s):  
Xun Lv ◽  
Ju Long Yuan ◽  
Dong Hui Wen ◽  
Qian Fa Deng ◽  
Fei Yan Lou
Keyword(s):  
Chemical Conversion ◽  
Processing Parameters ◽  
Precision Machining ◽  
High Tech ◽  
National Defense ◽  
Ball Surface ◽  
Angular Velocities ◽  
Ultra Precision ◽  
Relationship Of ◽  
The Mathematical Model

The high precision balls are requested in national defense, astronautics and high-tech commercial domain urgently. Conventional precision machining methods are sensitive to uniformity of abrasives and machining environment. After precision machining, there are easily to produce thick damaged layer on the ball surface because of machining stress and chemical conversion. On the basis of the floating polishing mechanism, a new scatheless ultra-precision polishing method of ball surface can solve the problems of abrasives uniformity effectively and damaged layer. In order to ensure that the new polishing method polishes ball surface equally, the appropriate angular velocities of the ball should be selected. This paper sets up the mathematical model about the motion of ball. By analyzing and simulating the relationship of the angular velocities, the best processing parameters are acquired.

scholarly journals Development of a Three Axis controlled Fast Tool Servo for Ultra Precision Machining (1st Report)

2007 ◽  
Vol 73 (12) ◽  
pp. 1345-1349 ◽  
Author(s):  
Toshihiko WADA ◽  
Masayuki TAKAHASHI ◽  
Toshimichi MORIWAKI ◽  
Keiichi NAKAMOTO
Keyword(s):  
Precision Machining ◽  
Fast Tool Servo ◽  
Ultra Precision

A kinematics and experimental analysis of form error compensation in ultra-precision machining

2008 ◽  
Vol 48 (12-13) ◽  
pp. 1408-1419 ◽  
Author(s):  
L.B. Kong ◽  
C.F. Cheung ◽  
S. To ◽  
W.B. Lee ◽  
J.J. Du ◽  
...  
Keyword(s):  
Experimental Analysis ◽  
Error Compensation ◽  
Precision Machining ◽  
Form Error ◽  
Ultra Precision

Ultra-Precision Machining of Dies for Microlens Arrays Using a Diamond Cutting Tool

2009 ◽  
Vol 407-408 ◽  
pp. 359-362 ◽  
Author(s):  
Takehisa Yoshikawa ◽  
Masayuki Kyoi ◽  
Yukio Maeda ◽  
Tomohisa Ohta ◽  
Masato Taya
Keyword(s):  
Cutting Tool ◽  
Diamond Tool ◽  
Liquid Crystal Displays ◽  
Precision Machining ◽  
Diamond Cutting ◽  
Microlens Arrays ◽  
Synchronous Control ◽  
Ultra Precision ◽  
Diamond Cutting Tool ◽  
Cutting Unit

Patterning of numerous microlenses on a surface improves the optical performance of components such as liquid crystal displays. A cutting method using a diamond tool is examined to fabricate a molding die that employs arbitrary array patterns to mold millions of microlenses. The present paper investigates machining of microlenses on the order of 2 kHz, using a piezo-actuated micro cutting unit and a synchronous control system of the cutting unit with an NC controller. Experiments using this system revealed that it is possible to machine a large number of microlenses on a molding die with high precision.

Freeform machining of ophthalmic toric lens mould using fast tool servo-assisted ultra-precision diamond turning process

2020 ◽  
pp. 251659842093974
Author(s):  
Ishan Anand Singh ◽  
Gopi Krishna S. ◽  
T. Narendra Reddy ◽  
Prakash Vinod
Keyword(s):  
Surface Roughness ◽  
Single Point ◽  
Measurement Data ◽  
Surface Profile ◽  
Diamond Turning ◽  
Fast Tool Servo ◽  
Toric Surface ◽  
Machined Surface ◽  
Ultra Precision ◽  
A Minor

This research aims to establish a methodology for machining of toric lenses, using fast tool servo-assisted single point diamond turning and to assess the generated surface for its characteristics. Using the established mathematical model, toric surface is explained to understand the geometry and to generate the parameters required for fast tool servo machining. A toric surface with a major diameter of 18.93 mm and a minor diameter of 15.12 mm has been cut on the intelligent ultra-precision turning machine (iUPTM). The surface profile and surface roughness were measured. After analysing the measurement data of the machined surface, on two perpendicular axes of the toric lens, form accuracy of 0.49 µm peak-to-valley (PV), and surface roughness of 12 nm in Ra, 4–8 nm in Sa are obtained. From the experimental results obtained, it can be concluded that the proposed method is a reasonable alternative for manufacturing toric lens mould.

scholarly journals Development of a Three Axis Controlled Fast Tool Servo for Ultra Precision Machining (2nd Report)

2008 ◽  
Vol 74 (5) ◽  
pp. 486-490 ◽  
Author(s):  
Toshihiko WADA ◽  
Masayuki TAKAHASHI ◽  
Toshimichi MORIWAKI ◽  
Keiichi NAKAMOTO
Keyword(s):  
Precision Machining ◽  
Fast Tool Servo ◽  
Ultra Precision

scholarly journals Development of a Three Axis Controlled Fast Tool Servo for Ultra Precision Machining (3rd Report)

2008 ◽  
Vol 74 (9) ◽  
pp. 971-975 ◽  
Author(s):  
Toshihiko WADA ◽  
Masayuki TAKAHASHI ◽  
Isao TASHIRO ◽  
Toshimichi MORIWAKI ◽  
Keiichi NAKAMOTO
Keyword(s):  
Precision Machining ◽  
Fast Tool Servo ◽  
Ultra Precision

scholarly journals Development of Piezo-Actuated Two-Degree-of-Freedom Fast Tool Servo System

Micromachines ◽  
2019 ◽  
Vol 10 (5) ◽  
pp. 337 ◽  
Author(s):  
Yamei Liu ◽  
Yanping Zheng ◽  
Yan Gu ◽  
Jieqiong Lin ◽  
Mingming Lu ◽  
...  
Keyword(s):  
Degrees Of Freedom ◽  
Precision Machining ◽  
Fast Tool Servo ◽  
Element Analysis ◽  
Actual Performance ◽  
Axis Direction ◽  
Compliance Modeling ◽  
Ultra Precision ◽  
Rotation Motion ◽  
Two Degree Of Freedom

Fast tool servo (FTS) machining technology is a promising method for freeform surfaces and machining micro-nanostructure surfaces. However, limited degrees of freedom (DOF) is an inherent drawback of existing FTS technologies. In this paper, a piezo-actuated serial structure FTS system is developed to obtain translational motions along with z and x-axis directions for ultra-precision machining. In addition, the principle of the developed 2-DOF FTS is introduced and explained. A high-rigidity four-bar (HRFB) mechanism is proposed to produce motion along the z-axis direction. Additionally, through a micro-rotation motion around flexible bearing hinges (FBHs), bi-directional motions along the x-axis direction can be produced. The kinematics of the mechanism are described using a matrix-based compliance modeling (MCM) method, and then the static analysis and dynamic analysis are performed using finite element analysis (FEA). Testing experiments were conducted to investigate the actual performance of the developed system. The results show that low coupling, proper travel, and high natural frequency are obtained. Finally, a sinusoidal wavy surface is uniformly generated by the mechanism developed to demonstrate the effectiveness of the FTS system.

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