The Carbon Vacancy Related EI4 Defect in 4H-SiC
2010 ◽
Vol 645-648
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pp. 399-402
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Keyword(s):
Electron paramagnetic resonance (EPR) was used to study high-purity semi-insulating 4H-SiC irradiated with 2 MeV electrons at room temperature. The EPR signal of the EI4 defect was found to be dominating in samples irradiated and annealed at ~750°C. Additional large-splitting 29Si hyperfine (hf) lines and also other 13C and 29Si hf structures were observed. Based on the observed hf structures and annealing behaviour, the complex between a negative carbon vacancy-carbon antisite pair (VCCSi–) and a distance positive carbon vacancy ( ) is tentatively proposed as a possible model for the EI4 defect.
2007 ◽
Vol 556-557
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pp. 465-468
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1991 ◽
Vol 46
(7)
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pp. 579-582
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1980 ◽
pp. 334-336
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2019 ◽
2008 ◽
Vol 600-603
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pp. 381-384
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