Development of RAF Quality 150mm 4H-SiC Wafer
2014 ◽
Vol 778-780
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pp. 17-21
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Keyword(s):
We have developed RAF (Repeated a-face) growth method which is high quality bulk crystal growth technology [1, 2]. A block crystal more than 150 mm square size was produced by the RAF growth method. Since c-face growth crystal was produced on the seed obtained from the block crystal, high quality 150mm 4H-SiC wafer was achieved. This paper reports the results of the quality evaluation.
Keyword(s):
2020 ◽
Vol 547
◽
pp. 125802
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Keyword(s):
2013 ◽
Vol 740-742
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pp. 311-314
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1990 ◽
Vol 102
(4)
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pp. 696-700
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Keyword(s):
2010 ◽
Vol 10
(2)
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pp. 548-552
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Keyword(s):
2000 ◽
2004 ◽
Vol 268
(1-2)
◽
pp. 328
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