The Electrical Characterization of Hydrogenated Amorphous Silicon Germanium Film Used in Un-Cooled Micro-Bolometer

2018 ◽  
Vol 937 ◽  
pp. 3-8
Author(s):  
Zhe Quan Chen ◽  
He Yong ◽  
Zhong Fang ◽  
Xu Chao Phan ◽  
He Yuan
Keyword(s):  
Amorphous Silicon ◽  
Silicon Germanium ◽  
Hydrogenated Amorphous Silicon ◽  
Chemical Vapour ◽  
Electrical Characterization ◽  
Deposition Parameter ◽  
Temperature Dependence Of Conductivity ◽  
Amorphous Silicon Germanium ◽  
Hydrogenated Amorphous

In this paper, the deposition and the electrical characterization of hydrogenated amorphous silicon germanium (a-SixGey:H) thin films were performed by plasma enhanced chemical vapour deposition (PECVD) at low temperature with different flow ratios of SiH4/GeH4. The temperature coefficient of resistance (TCR) and temperature dependence of conductivity were measured to study the influence of deposition parameter. The resistance uniformity were also investigated. The result showed that the film presented high TCR values of around 3.5%K-1and moderate conductivity value of 1.47×10-3(Ω•cm)-1respectively at room temperature, while the non-uniformity below 5% which indicated the high resistance uniformity in films.

Properties of Catalytic-Cvd Amorphous Silicon-Germanium (a-SiGe:H)

1990 ◽  
Vol 192 ◽  
Author(s):  
Hideki Matsumura ◽  
Masaaki Yamaguchi ◽  
Kazuo Morigaki
Keyword(s):  
Amorphous Silicon ◽  
Silicon Germanium ◽  
Hydrogenated Amorphous Silicon ◽  
Chemical Vapor ◽  
Characteristic Energy ◽  
Optical Band Gaps ◽  
Spin Resonance ◽  
Amorphous Silicon Germanium ◽  
Conductive Properties ◽  
Hydrogenated Amorphous

ABSTRACTHydrogenated amorphous silicon-germanium (a-SiGe:H) films are prepared by the catalytic chemical vapor deposition (Cat-CVD) method using a SiH4, GeH4 and H4 gas mixture. Properties of the films are investigated by the photo-thermal deflection spectroscopy (PDS) and electron spin resonance (ESR) measurements, in addition to the photo-conductive and structural studies. It is found that the characteristic energy of Urbach tail, ESR spin density and other photo-conductive properties of Cat-CVD a-SiGe:H films with optical band gaps around 1.45 eV are almost equivalent to those of the device quality glow discharge hydrogenated amorphous silicon (a-Si:H).

Simulation of Hydrogenated Amorphous Silicon Germanium Alloys for Bandgap Grading

1999 ◽  
Vol 557 ◽  
Author(s):  
E. Schroten ◽  
M. Zeman ◽  
R. A. C. M. M. van Swaaij ◽  
L. L. A. Vosteen ◽  
J. W. Metselaar
Keyword(s):  
Amorphous Silicon ◽  
Material Properties ◽  
Silicon Germanium ◽  
Hydrogenated Amorphous Silicon ◽  
Model Parameters ◽  
Current Voltage ◽  
Current Voltage Characteristics ◽  
Amorphous Silicon Germanium ◽  
Parameter Values ◽  
Hydrogenated Amorphous

AbstractComputer simulations are reported of hydrogenated amorphous silicon germanium (a-SiGe:H) layers that make up the graded part of the intrinsic layer near the interfaces of a-SiGe:H solar cells. Therefore the graded part is approached with a ‘staircase’ bandgap profile, consisting of three layers within which the material properties are constant. Calibrated model parameters are obtained by matching simulation results of material properties of intrinsic a-SiGe:H single layers to measurements. Using the obtained model parameter sets subsequent simulations of p-i-n devices with intrinsic material similar to the single layers are matched to measured current-voltage characteristics. The changes in parameter values are evaluated as a function of optical gap.

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