Electrical Characterization of As-Processed Semiconductor Surfaces - Invited Paper
Keyword(s):
The paper is concerned with electrical characterization of as-processed semiconductor surfaces and near-surface regions for the purpose of process development and monitoring. The methods of electrical characterization based on Surface Photovoltage (SPV) and Photoconductance Decay (PCD) effects are discussed as being particularly conducive with the needs of as-processed semiconductor surface characterization and experimental results demonstrating merits of the proposed methodology are presented.
2007 ◽
Vol 5
(5)
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pp. 331-336
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Keyword(s):
Keyword(s):
2007 ◽
Vol 28
(2-3)
◽
pp. 169-197
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