Pressure sensors are commonly used in industrial production and mechanical system. However, resistance strain, piezoresistive sensor, and ceramic capacitive pressure sensors possess limitations, especially in micro force measurement. A surface acoustic wave (SAW) based micro force sensor is designed in this paper, which is based on the theories of wavelet transform, SAW detection, and pierce oscillator circuits. Using lithium niobate as the basal material, a mathematical model is established to analyze the frequency, and a peripheral circuit is designed to measure the micro force. The SAW based micro force sensor is tested to show the reasonable design of detection circuit and the stability of frequency and amplitude.
Circuit Design of Surface Acoustic Wave Based Micro Force Sensor