5.4.1 Potentials of Capacitive Micromachined Ultrasonic Transducers (CMUT) and Film Bulk Acoustic Wave Resonators (FBAR) for Gas Sensing -an Industrial Point of View
2014 ◽
Vol 105
(16)
◽
pp. 162910
◽
Andrey Kozyrev
◽
Anatoly Mikhailov
◽
Sergey Ptashnik
◽
Peter K. Petrov
◽
Neil Alford
2002 ◽
Vol 66
(3-4)
◽
pp. 467-472
◽
Y Yoshino
◽
M Takeuchi
◽
K Inoue
◽
T Makino
◽
S Arai
◽
...
Q.X. Su
◽
P.B. Kirby
◽
E. Komuro
◽
R.W. Whatmore
2009 ◽
Vol 56
(8)
◽
pp. 1731-1744
◽
Tuomas Pensala
◽
Markku Ylilammi
2008 ◽
Vol 55
(11)
◽
pp. 2463-2468
◽
Ji Wang
◽
Jian-song Liu
◽
Jian-ke Du
◽
De-jin Huang
2010 ◽
Vol 157
(12)
◽
pp. J419
◽
G. M. Ashley
◽
P. B. Kirby
◽
T. P. Butler
◽
R. Whatmore
◽
J. K. Luo
Qingming Chen
◽
Fang Li
◽
Hongbin Cheng
◽
Qing-Ming Wang
H. Campanella
◽
J. Esteve
◽
J. Montserrat
◽
A. Romano-Rodriguez
◽
A. Uranga
◽
...
M. Loschonsky
◽
D. Eisele
◽
L. M. Reindl
Close
Export Citation Format
Close
Share Document
Close