Electric Field Control by Guide Ring in Capacitively Coupled Plasma Electrode
2019 ◽
Vol 68
(11)
◽
pp. 1465-1469
Keyword(s):
2018 ◽
Vol 10
(3)
◽
pp. 2843-2849
◽
1997 ◽
Vol 772
(1-2)
◽
pp. 221-230
◽
Keyword(s):
Keyword(s):
2014 ◽
Vol 105
(3)
◽
pp. 37012
◽