Synthesis of transparent diamond-like carbon film on the glass by radio-frequency plasma enhanced chemical vapor deposition

Journal of the Korean Crystal Growth and Crystal Technology ◽

10.6111/jkcgct.2012.22.4.190 ◽

2012 ◽

Vol 22 (4) ◽

pp. 190-193 ◽

Author(s):

Tae-Gyu Kim ◽

Yeong-Ho Shin ◽

Hyun Cho ◽

Jin-Kon Kim

Keyword(s):

Chemical Vapor Deposition ◽

Radio Frequency ◽

Vapor Deposition ◽

Carbon Film ◽

Chemical Vapor ◽

Diamond Like Carbon ◽

Radio Frequency Plasma ◽

Diamond Like Carbon Film ◽

Frequency Plasma

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Development ofCH4-Radio-Frequency-Plasma-Enhanced Chemical Vapor Deposition Method with a Positively Self-Biased Electrode for Diamond-Like Carbon Film

Japanese Journal of Applied Physics ◽

10.1143/jjap.36.2817 ◽

1997 ◽

Vol 36 (Part 1, No. 5A) ◽

pp. 2817-2821 ◽

Author(s):

Hiroshi Inaba ◽

Yuuichi Kokaku ◽

Masatomo Terakado ◽

Hiroyuki Kataoka

Keyword(s):

Chemical Vapor Deposition ◽

Radio Frequency ◽

Vapor Deposition ◽

Carbon Film ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Diamond Like Carbon ◽

Radio Frequency Plasma ◽

Deposition Method ◽

Frequency Plasma

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Characterization and tribological application of diamond-like carbon (DLC) films prepared by radio-frequency plasma-enhanced chemical vapor deposition (RF-PECVD) technique

Frontiers of Materials Science in China ◽

10.1007/s11706-009-0070-8 ◽

2009 ◽

Vol 3 (4) ◽

pp. 409-414 ◽

Author(s):

Ning Cao ◽

Zhen-yi Fei ◽

Yong-xin Qi ◽

Wen-wen Chen ◽

Lu-lu Su ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Radio Frequency ◽

Vapor Deposition ◽

Chemical Vapor ◽

Diamond Like Carbon ◽

Radio Frequency Plasma ◽

Tribological Application ◽

Frequency Plasma

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Multi-layer haemocompatible diamond-like carbon coatings obtained by combined radio frequency plasma enhanced chemical vapor deposition and magnetron sputtering

Journal of Materials Science Materials in Medicine ◽

10.1007/s10856-013-5026-y ◽

2013 ◽

Vol 24 (12) ◽

pp. 2695-2707 ◽

Author(s):

A. C. Popa ◽

G. E. Stan ◽

M. A. Husanu ◽

I. Pasuk ◽

I. D. Popescu ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Vapor Deposition ◽

Chemical Vapor ◽

Diamond Like Carbon ◽

Radio Frequency Plasma ◽

Carbon Coatings ◽

Frequency Plasma

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Effects of Silicon Source Gas and Substrate Bias on the Film Properties of Si-Incorporated Diamond-Like Carbon by Radio-Frequency Plasma-Enhanced Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.48.116002 ◽

2009 ◽

Vol 48 (11) ◽

pp. 116002 ◽

Author(s):

Hideki Nakazawa ◽

Takeshi Kinoshita ◽

Yuhta Kaimori ◽

Yuhki Asai ◽

Maki Suemitsu ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Radio Frequency ◽

Vapor Deposition ◽

Chemical Vapor ◽

Diamond Like Carbon ◽

Radio Frequency Plasma ◽

Substrate Bias ◽

Film Properties ◽

Silicon Source ◽

Frequency Plasma

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Synthesis of carbon nanosheets by inductively coupled radio-frequency plasma enhanced chemical vapor deposition

Carbon ◽

10.1016/j.carbon.2004.06.035 ◽

2004 ◽

Vol 42 (14) ◽

pp. 2867-2872 ◽

Author(s):

Jianjun Wang ◽

Mingyao Zhu ◽

Ron A. Outlaw ◽

Xin Zhao ◽

Dennis M. Manos ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Radio Frequency ◽

Vapor Deposition ◽

Chemical Vapor ◽

Radio Frequency Plasma ◽

Carbon Nanosheets ◽

Inductively Coupled ◽

Frequency Plasma

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GROWING CARBON BUCKONIONS BY RADIO FREQUENCY PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION

Acta Physica Sinica ◽

10.7498/aps.50.1264 ◽

2001 ◽

Vol 50 (7) ◽

pp. 1264

Author(s):

CHEN XIAO-HUA ◽

WU GUO-TAO ◽

DENG FU-MING ◽

WANG JIAN-XIONG ◽

YANG HANG-SHENG ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Radio Frequency ◽

Vapor Deposition ◽

Chemical Vapor ◽

Radio Frequency Plasma ◽

Frequency Plasma

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Synthesis of carbon nanosheets and carbon nanotubes by radio frequency plasma enhanced chemical vapor deposition

Diamond and Related Materials ◽

10.1016/j.diamond.2006.05.007 ◽

2007 ◽

Vol 16 (2) ◽

pp. 196-201 ◽

Author(s):

Mingyao Zhu ◽

Jianjun Wang ◽

Ronald A. Outlaw ◽

Kun Hou ◽

Dennis M. Manos ◽

...

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Radio Frequency ◽

Vapor Deposition ◽

Chemical Vapor ◽

Radio Frequency Plasma ◽

Carbon Nanosheets ◽

Frequency Plasma

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Silicon rich silicon oxide films deposited by radio frequency plasma enhanced chemical vapor deposition method: Optical and structural properties

Applied Surface Science ◽

10.1016/j.apsusc.2011.05.112 ◽

2011 ◽

Vol 257 (23) ◽

pp. 9717-9723 ◽

Author(s):

Sumita Mukhopadhyay ◽

Swati Ray

Keyword(s):

Chemical Vapor Deposition ◽

Radio Frequency ◽

Structural Properties ◽

Vapor Deposition ◽

Silicon Oxide ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Radio Frequency Plasma ◽

Deposition Method ◽

Frequency Plasma

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Tensile test of a silicon microstructure fully coated with submicrometer-thick diamond like carbon film using plasma enhanced chemical vapor deposition method

Japanese Journal of Applied Physics ◽

10.7567/jjap.56.06gn01 ◽

2017 ◽

Vol 56 (6S1) ◽

pp. 06GN01 ◽

Author(s):

Wenlei Zhang ◽

Akio Uesugi ◽

Yoshikazu Hirai ◽

Toshiyuki Tsuchiya ◽

Osamu Tabata

Keyword(s):

Chemical Vapor Deposition ◽

Tensile Test ◽

Vapor Deposition ◽

Carbon Film ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Diamond Like Carbon ◽

Deposition Method ◽

Diamond Like Carbon Film

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Photovoltaic Properties of Boron-Incorporated Amorphous Carbon on n-Si Heterojunction Grown by Radio Frequency Plasma-Enhanced Chemical Vapor Deposition Using Trimethylboron

Japanese Journal of Applied Physics ◽

10.1143/jjap.42.l273 ◽

2003 ◽

Vol 42 (Part 2, No. 3B) ◽

pp. L273-L276 ◽

Author(s):

Yasuhiko Hayashi ◽

Tetsuo Soga ◽

Takashi Jimbo

Keyword(s):

Chemical Vapor Deposition ◽

Radio Frequency ◽

Amorphous Carbon ◽

Vapor Deposition ◽

Chemical Vapor ◽

Radio Frequency Plasma ◽

Photovoltaic Properties ◽

Frequency Plasma

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