Tensile test of a silicon microstructure fully coated with submicrometer-thick diamond like carbon film using plasma enhanced chemical vapor deposition method

Japanese Journal of Applied Physics ◽

10.7567/jjap.56.06gn01 ◽

2017 ◽

Vol 56 (6S1) ◽

pp. 06GN01 ◽

Author(s):

Wenlei Zhang ◽

Akio Uesugi ◽

Yoshikazu Hirai ◽

Toshiyuki Tsuchiya ◽

Osamu Tabata

Keyword(s):

Chemical Vapor Deposition ◽

Tensile Test ◽

Vapor Deposition ◽

Carbon Film ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Diamond Like Carbon ◽

Deposition Method ◽

Diamond Like Carbon Film

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Development of a polygonal barrel-plasma enhanced chemical vapor deposition method for preparing powdered materials with a diamond-like carbon film

Chemical Engineering Journal ◽

10.1016/j.cej.2012.08.051 ◽

2012 ◽

Vol 209 ◽

pp. 616-622 ◽

Author(s):

Yuji Honda ◽

Satoshi Akamaru ◽

Mitsuhiro Inoue ◽

Takayuki Abe

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Carbon Film ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Diamond Like Carbon ◽

Deposition Method ◽

Diamond Like Carbon Film

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Development ofCH4-Radio-Frequency-Plasma-Enhanced Chemical Vapor Deposition Method with a Positively Self-Biased Electrode for Diamond-Like Carbon Film

Japanese Journal of Applied Physics ◽

10.1143/jjap.36.2817 ◽

1997 ◽

Vol 36 (Part 1, No. 5A) ◽

pp. 2817-2821 ◽

Author(s):

Hiroshi Inaba ◽

Yuuichi Kokaku ◽

Masatomo Terakado ◽

Hiroyuki Kataoka

Keyword(s):

Chemical Vapor Deposition ◽

Radio Frequency ◽

Vapor Deposition ◽

Carbon Film ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Diamond Like Carbon ◽

Radio Frequency Plasma ◽

Deposition Method ◽

Frequency Plasma

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Preparation of Polymer Particles Coated with a Diamond-like Carbon Film by a Polygonal Barrel-Plasma Chemical Vapor Deposition Method

ECS Meeting Abstracts ◽

10.1149/ma2012-02/39/2937 ◽

2012 ◽

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Carbon Film ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Diamond Like Carbon ◽

Deposition Method ◽

Polymer Particles ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition

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Synthesis of transparent diamond-like carbon film on the glass by radio-frequency plasma enhanced chemical vapor deposition

Journal of the Korean Crystal Growth and Crystal Technology ◽

10.6111/jkcgct.2012.22.4.190 ◽

2012 ◽

Vol 22 (4) ◽

pp. 190-193 ◽

Author(s):

Tae-Gyu Kim ◽

Yeong-Ho Shin ◽

Hyun Cho ◽

Jin-Kon Kim

Keyword(s):

Chemical Vapor Deposition ◽

Radio Frequency ◽

Vapor Deposition ◽

Carbon Film ◽

Chemical Vapor ◽

Diamond Like Carbon ◽

Radio Frequency Plasma ◽

Diamond Like Carbon Film ◽

Frequency Plasma

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Formation of wedge-shaped carbon film by chemical vapor deposition method and observation using transmission electron microscopy

Scripta Materialia ◽

10.1016/j.scriptamat.2005.03.007 ◽

2005 ◽

Vol 52 (12) ◽

pp. 1205-1209 ◽

Author(s):

K KANEKO ◽

R NAGAYAMA ◽

K INOKE ◽

W MOON ◽

Z HORITA ◽

...

Keyword(s):

Electron Microscopy ◽

Transmission Electron Microscopy ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Carbon Film ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Deposition Method ◽

Transmission Electron

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Effects of silicon on microstructure and corrosion resistance of diamond-like-carbon film prepared on 2024 aluminum alloy by plasma-enhanced chemical vapor deposition

Diamond and Related Materials ◽

10.1016/j.diamond.2020.108144 ◽

2020 ◽

Vol 110 ◽

pp. 108144 ◽

Author(s):

Hongyun Deng ◽

Dongxu Chen ◽

Yanan Wang ◽

Yanwen Zhou ◽

Peng Gao

Keyword(s):

Corrosion Resistance ◽

Aluminum Alloy ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Carbon Film ◽

Chemical Vapor ◽

Diamond Like Carbon ◽

2024 Aluminum Alloy ◽

Diamond Like Carbon Film

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Synthesis of carbon nanotubes on diamond-like carbon by the hot filament plasma-enhanced chemical vapor deposition method

Micron ◽

10.1016/j.micron.2009.02.009 ◽

2009 ◽

Vol 40 (5-6) ◽

pp. 612-616 ◽

Author(s):

Eun Chang Choi ◽

Yong Seob Park ◽

Byungyou Hong

Keyword(s):

Carbon Nanotubes ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Diamond Like Carbon ◽

Deposition Method ◽

Hot Filament ◽

Synthesis Of Carbon Nanotubes ◽

Filament Plasma

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Electrical conductive hard-carbon (diamond-like carbon) films formed by i-C4H10/N2 supermagnetron plasma chemical vapor deposition method

Thin Solid Films ◽

10.1016/s0040-6090(00)01091-9 ◽

2000 ◽

Vol 373 (1-2) ◽

pp. 251-254 ◽

Author(s):

Haruhisa Kinoshita ◽

Jun Takahashi ◽

Takuya Hando

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Carbon Films ◽

Chemical Vapor Deposition Method ◽

Diamond Like Carbon ◽

Deposition Method ◽

Hard Carbon ◽

Plasma Chemical ◽

Plasma Chemical Vapor Deposition

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CSW-14: High-rate Synthesis of Diamond-like Carbon Films by Bipolar Nanopulse Chemical Vapor Deposition Method(CSW-III: COATING, SURFACE MODIFICATION AND WEAR)

The Proceedings of the JSME Materials and Processing Conference (M&P) ◽

10.1299/jsmeintmp.2005.45_5 ◽

2005 ◽

Vol 2005 (0) ◽

pp. 45-46

Author(s):

T. SAITO ◽

Y. KONDO ◽

T. TERAZAWA ◽

N. OHTAKE

Keyword(s):

Surface Modification ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Carbon Films ◽

High Rate ◽

Chemical Vapor Deposition Method ◽

Diamond Like Carbon ◽

Deposition Method ◽

Coating Surface

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Characterization of diamond-like carbon thin films prepared by a microwave plasma enhanced chemical vapor deposition method

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2003.10.033 ◽

2004 ◽

Vol 180-181 ◽

pp. 254-258 ◽

Author(s):

Won Seok Choi ◽

Ilsub Chung ◽

Young-Ze Lee ◽

Byungyou Hong

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Microwave Plasma ◽

Chemical Vapor ◽

Chemical Vapor Deposition Method ◽

Diamond Like Carbon ◽

Deposition Method ◽

Carbon Thin Films

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